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PRESSURE SENSOR WITH THIN MEMBRANE

  • US 20060081058A1
  • Filed: 10/18/2004
  • Published: 04/20/2006
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a chamber partially defined by a flexible membrane, the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects from any pressure difference between the reference pressure and the fluid pressure, the membrane being at least partially formed from conductive material; and

    , associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure;

    wherein, the flexible membrane is less than 3 microns thick.

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