Dual scara arm

  • US 20060099063A1
  • Filed: 06/09/2005
  • Published: 05/11/2006
  • Est. Priority Date: 06/09/2004
  • Status: Active Grant
First Claim
Patent Images

1. A substrate transport apparatus comprising:

  • a drive section; and

    a scara arm operably connected to the drive section to move the scara arm, the scara arm comprising;

    an upper arm and at least one forearm movably mounted on the upper arm and capable of holding a substrate thereon, wherein the upper arm is a substantially rigid link that is adjustable for changing a predetermined dimension of the upper arm.

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