Interferometric modulator array with integrated MEMS electrical switches

• US 20060103613A1
• Filed: 06/10/2005
• Published: 05/18/2006
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence
• Granted Patent: US 7,345,805 B2
• Time in Patent Office: Days
• US Class Current: 345/85
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/0473 Use of light emitting or modulating elements having two or more stable states when no power is applied
• CPC Class Codes: G09G 2300/06 Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 2310/0267 Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
• CPC Class Codes: G09G 2310/0275 Details of drivers for data electrodes, other than drivers for liquid crystal, plasma or OLED displays, not related to handling digital grey scale data or to communication of data to the pixels by means of a current
• CPC Class Codes: G09G 2330/021 Power management, e.g. power saving
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

An interferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.

Claims

1. A display device comprising:

a MEMS display portion comprising rows and columns of MEMS display elements; and

a plurality of MEMS switches formed as one or more additional rows or columns of MEMS switch elements adjacent to said display portion.

2. The device of claim 1, wherein at least some of the plurality of MEMS switches are collapsible cavity MEMS switches that each comprise:

first and second terminals;

a first electrode; and

a deformable layer responsive to a voltage across the layer and the first electrode, wherein the first and second terminals are selectively connectable.

3. The device of claim 1, wherein said MEMS display and MEMS switches are fabricated on a glass substrate.

4. The device of claim 1, wherein the plurality of MEMS switches forms in part row or column select circuitry.

8. The apparatus of claim 1, further comprising:

a display;

a processor that is in electrical communication with said display, said processor being configured to process image data;

a memory device in electrical communication with said processor.

9. The display system as recited in claim 8, further comprising:

a first controller configured to send at least one signal to said display; and

a second controller configured to send at least a portion of said image data to said first controller.

10. The display system as recited in claim 8, further comprising:

an image source module configured to send said image data to said processor.

11. The display system as recited in claim 8, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.

12. The display system as recited in claim 8, further comprising:

an input device configured to receive input data and to communicate said input data to said processor.

5. A method of making a MEMS display device, the method comprising:

forming rows and columns of MEMS display elements on a substrate; and

forming one or more rows or columns of MEMS switches on the same or a different substrate, wherein at least some of said MEMS switches are coupled to the display.

6. The method of claim 5, wherein the steps of forming the display elements and forming the plurality of MEMS switches comprise performing at least some common processing steps.

7. The method of claim 6, wherein said MEMS display elements and said MEMS switches are formed on a common glass substrate.

13. A display device configured to display an image based on data, the device comprising:

means for displaying the image comprising rows and columns of MEMS display elements; and

means for switching data to the means for displaying comprising a plurality of MEMS switches formed as one or more additional rows or columns of MEMS switch elements adjacent to said display portion.

14. The device of claim 13, further comprising:

means for selecting rows or columns; and

means for switching data to the selected rows and columns.