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Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films

  • US 20060118408A1
  • Filed: 05/16/2005
  • Published: 06/08/2006
  • Est. Priority Date: 12/03/2004
  • Status: Active Grant
First Claim
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1. A method for depositing coatings onto substrates, the method comprising:

  • a) providing a coater having a substrate transport system defining a path of substrate travel extending through the coater, wherein at least part of a lower sputtering target is mounted below the path of substrate travel;

    b) positioning a glass sheet on the transport system and conveying the glass sheet along the path of substrate travel, such that the glass sheet is conveyed over the lower target; and

    c) sputtering the lower target so as to deposit a desired film upon a bottom major surface of the glass sheet, the desired film having a refractive index of greater than 1.55, the desired film having an optical thickness of less than about 400 angstroms.

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