Piezoresistive pressure sensor
First Claim
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1. A pressure sensor comprising:
- a housing portion with a fluid inlet; and
a polymer substrate within the housing portion and coated with piezoresistive material, wherein the piezoresistive material coated on the polymer substrate forms a first resistor, wherein the polymer substrate includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.
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Abstract
A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.
76 Citations
27 Claims
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1. A pressure sensor comprising:
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a housing portion with a fluid inlet; and
a polymer substrate within the housing portion and coated with piezoresistive material, wherein the piezoresistive material coated on the polymer substrate forms a first resistor, wherein the polymer substrate includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. - View Dependent Claims (2, 6, 7, 8, 9, 10, 11, 12)
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- 3. The pressure sensor of claim I wherein the polymer substrate includes a central region, an edge region, a first electrode over the central region, and a second electrode over the edge region.
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13. A pressure sensor comprising:
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a housing with a fluid inlet fluidically coupled with a chamber;
a first polymer element within the housing having a first resistor formed of piezoresistive material and at least one electrode; and
a second polymer element within the housing having a second resistor formed of piezoresistive material and at least one electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A process comprising:
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applying pressure at a fluid inlet;
deflecting a polymer element having a piezoresistor, a first electrode and a second electrode deposited thereon; and
measuring a variation in resistance of the piezoresistor to calculate the applied pressure, wherein the variation in resistance is directly or indirectly proportional to the applied pressure. - View Dependent Claims (25, 26, 27)
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Specification