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Method and apparatus for reducing or eliminating stray light in an optical test head

  • US 20060151726A1
  • Filed: 04/22/2005
  • Published: 07/13/2006
  • Est. Priority Date: 01/13/2005
  • Status: Active Grant
First Claim
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1. Apparatus comprising:

  • at least one input path for receiving light from a light source and communicating said light to a workpiece;

    a light detector for receiving light and generating a signal in response thereto;

    at least one output path for receiving light reflected from said workpiece and communicating said light to said detector;

    wherein at least one of said at least one output path or at least one input path includes a light-absorptive layer for absorbing and/or trapping stray light.

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