Miniature electro-optic device and corresponding uses thereof

• US 20060152739A1
• Filed: 11/18/2003
• Published: 07/13/2006
• Est. Priority Date: 11/19/2002
• Status: Active Grant

• Current Assignee: Baolab Microsystems SL
• Original Assignee: Baolab Microsystems SL Institut Politecnic Campus de Terrassa
• Inventors: Silvestre, Josep Montanya
• Granted Patent: US 7,446,300 B2
• Time in Patent Office: Days
• US Class Current: 356/614
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01P 15/093 by photoelectric pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: H01H 2036/0093 Micromechanical switches actuated by a change of the magnetic field
• CPC Class Codes: H01H 2037/008 Micromechanical switches operated thermally
• CPC Class Codes: H01H 35/02 Switches operated by change of position, inclination or orientation of the switch itself in relation to gravitational field tilting mercury container H01H29/20; change of position due to change of liquid level H01H35/18
• CPC Class Codes: H01H 35/14 Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch wherein the liquid constitutes a contact of the switch H01H29/002
• CPC Class Codes: H01H 35/24 Switches operated by change of fluid pressure, by fluid pressure waves, or by change of fluid flow wherein the change of pressure is caused by change of temperature H01H37/36
• CPC Class Codes: H01H 36/00 Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A miniaturized electro-optical device having a first zone facing a second zone, a first condenser plate, a second condenser plate arranged in the second zone and smaller than or equal to the first condenser plate, an intermediate space between both zones, with a conductive element arranged therein and which is independent from the side walls and moves thereacross the space depending on voltages present across both plates, two inlet/outlet points for light of an optical circuit, where the conductive element modifies the state of passage of light between the inlet/outlet points, when it is in contact with the stop. The device can be used, for example, as an accelerometer, a tiltmeter, a Coriolis force detector, a microphone, for acoustic applications, for the manufacture of an optical switching matrix, for the projection of images or as a pressure flowrate, temperature, gas, sensor.

Claims

1-30. -30. (canceled)

31. A miniaturized electro-optical device comprising:

a first zone facing a second zone,

a first condenser plate arranged in said first zone,

a second condenser plate arranged in said second zone and facing said first condenser plate, in which said second plate is smaller than or equal to said first condenser plate,

an intermediate space arranged between said first zone and said second zone,

a conductive element arranged in said intermediate space, said conductive element being mechanically independent from said first zone and second zone and being suitable for effecting a movement across said intermediate space from said first zone to said second zone and vice versa, depending on voltages present in said first and second condenser plates,

a first inlet/outlet point of light from an optical circuit, a second inlet/outlet point of said optical circuit, arranged in such a way as to allow the passage of light therebetween,

at least one first stop, where said conductive element is suitable for establishing contact with said first stop and where said conductive element modifies the state of passage of light between said first inlet/outlet point and said second inlet/outlet point when it is in contact with said first stop.

32. The electro-optical device of claim 31, wherein said first stop is arranged between said second zone and said conductive element.

33. The electro-optical device of claim 31, further comprising:

a third condenser plate arranged in said second zone, where said third condenser plate is smaller than or equal to said first condenser plate, and where said second and third condenser plates are, together, larger than said first condenser plate.

34. The electro-optical device of claim 31, further comprising:

a third condenser plate arranged in said second zone and a fourth condenser plate arranged in said first zone, where said first condenser plate and said second condenser plate are equal to each other, and said third condenser plate and said fourth condenser plate are equal to each other.

35. The electro-optical device of claim 34, wherein said first, second, third and fourth condenser plates are all equal to each other.

36. The electro-optical device of claim 34, further comprising:

a fifth condenser plate arranged in said first zone and a sixth condenser plate arranged in said second zone, where said fifth condenser plate and said sixth condenser plate are equal to each other.

37. The electro-optical device of claim 31, further comprising:

a second stop between said first zone and said conductive element.

38. The electro-optical device of claim 37, further comprising:

a third inlet/outlet point and a fourth inlet/outlet point arranged between said first zone and said conductive element such that said conductive element modifies the state of passage of light from a second optical circuit when in contact with said second stop.

39. The electro-optical device of claim 31, wherein each of assemblies of said condenser plates arranged in each of said first zone and second zone has a central symmetry relative to a centre of symmetry, where said center of symmetry is superimposed on center of masses of said conductive element.

40. The electro-optical device of claim 31, wherein assembly of said condenser plates arranged in each of said first zone and second zone has central asymmetry, thereby generating a moment of forces relative to the center of masses of said conductive element.

41. The electro-optical device of claim 31, wherein said conductive element has rounded external surfaces.

42. The electro-optical device of claim 41, wherein said conductive element is cylindrical.

43. The electro-optical device of claim 41, wherein said conductive element is spherical.

44. The electro-optical device of claim 31, wherein said conductive element has an upper face and a lower face, said upper and lower faces being perpendicular to said movement of said conductive element, and at least one side face, where said side face has slight protuberances.

45. The electro-optical device of claim 31, wherein said conductive element is hollow.

46. The electro-optical device of claim 31, wherein said first condenser plate has a surface area which is equal to or double the surface area of said second condenser plate.

47. Use of an electro-optical device according to claim 31, as an accelerometer.

48. Use of an electro-optical device according to claim 31, as a tiltmeter.

49. Use of an electro-optical device according to claim 31, as a detector of Coriolis forces.

50. Use of an electro-optical device according to claim 31, as a pressure sensor.

51. Use of an electro-optical device according to claim 31, as a microphone.

52. Use of an electro-optical device according to claim 31, as a flowrate sensor.

53. Use of an electro-optical device according to claim 31, as a temperature sensor.

54. Use of an electro-optical device according to claim 31, for acoustic applications.

55. Use of an electro-optical device according to claim 31, as a gas sensor.

56. Use of an electro-optical device according to claim 31, for the manufacture of an optical switching matrix.

57. Use of an electro-optical device according to claim 31, for projecting images.