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Programmable micromirror motion control system

  • US 20060152792A1
  • Filed: 03/06/2006
  • Published: 07/13/2006
  • Est. Priority Date: 06/18/2004
  • Status: Active Grant
First Claim
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1. A programmable micromirror motion control system comprising:

  • a. at least one stepper plate, configured to be rotated to uphold micromirror structure, wherein the stepper plate has at least two contact points with different heights to make the stepper plate to have a motion of rotation. b. a bottom layer configured to have at least one electrode to control the stepper plate; and

    c. a micromirror.

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