Fluid concentration sensing arrangement
First Claim
Patent Images
1. A fluid concentration sensing arrangement comprising:
- a) a flow member having an inlet opening, an outlet opening and a cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member such that a sensing surface is in communication with the cavity, wherein the cavity directs fluid flow against the sensing surface such that fluid is constantly in contact with the sensing surface.
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Abstract
Fluid flow arrangements that include optical fluid concentration sensors are disclosed. One arrangement directs fluid flow toward or against a sensor window. One arrangement inhibits light from entering a region that is sensed by the sensor. One arrangement includes a plurality of sensors that monitor blended fluids.
103 Citations
44 Claims
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1. A fluid concentration sensing arrangement comprising:
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a) a flow member having an inlet opening, an outlet opening and a cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member such that a sensing surface is in communication with the cavity, wherein the cavity directs fluid flow against the sensing surface such that fluid is constantly in contact with the sensing surface. - View Dependent Claims (3, 4, 5)
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2. A fluid concentration sensing arrangement comprising:
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a) a flow member having an inlet opening, an outlet opening and a generally bowl shaped cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member such that a sensing surface is in communication with the bowl shaped cavity, wherein the bowl shaped cavity directs fluid flow toward the sensing surface.
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6. A fluid concentration sensing arrangement comprising:
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a) a flow member having an inlet opening, an outlet opening and a cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member such that a sensing surface is in communication with the cavity, wherein the cavity directs fluid flow in a direction that is transverse with respect to the sensing surface, such that a maximum velocity of the fluid within five millimeters of the sensing surface is less than ten feet per second. - View Dependent Claims (7)
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8. A method of measuring a concentration of a fluid comprising:
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a) directing fluid flow with a generally bowl shaped surface toward a sensing surface of a fluid concentration sensor;
b) measuring a concentration of the fluid directed toward the sensing surface by the bowl shaped surface with the fluid concentration sensor. - View Dependent Claims (9, 10, 11, 12, 14)
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13. A method of measuring a concentration of a fluid comprising:
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a) directing fluid flow toward a sensing surface of a fluid concentration sensor in a direction that is transverse with respect to the sensing surface, wherein a maximum velocity of the fluid within five millimeters of the sensing surface is less than ten feet per second;
b) measuring a concentration of the fluid directed toward the sensing surface with a fluid concentration sensor.
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15. A fluid concentration sensing arrangement comprising:
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a) a flow member made from an at least partially translucent material having an inlet opening, an outlet opening and a cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member such that a sensing surface is in communication with the cavity;
c) an opaque material positioned to inhibit light from entering the cavity. - View Dependent Claims (16, 17, 18, 19, 20)
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21. A method of measuring a concentration of a fluid comprising:
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a) providing fluid flow through an at least partially translucent material to a sensing area of a fluid concentration sensor;
b) inhibiting ambient light from passing through the at least partially translucent material and entering the sensing area;
c) measuring a concentration of the fluid in the sensing area.
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22. A fluid blending system comprising:
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a) a manifold member defining;
i) a first fluid inlet passage;
ii) a second fluid inlet passage;
iii) a mixed fluid outlet passage;
iv) a mixing cavity in fluid communication with the first fluid inlet passage, the second fluid inlet passage; and
the mixed fluid outlet passage;
b) a first fluid control valve assembled with the manifold member for controlling flow of a first fluid to the first fluid inlet passage;
c) a first fluid concentration sensor assembled with the manifold member for measuring a concentration of the first fluid flowing through the first fluid inlet passage;
d) a second fluid control valve assembled with the manifold member for controlling flow of a second fluid to the second fluid inlet passage;
e) a second fluid concentration sensor assembled with the manifold member for measuring a concentration of the second fluid flowing through the second fluid inlet passage;
f) a mixed fluid concentration sensor assembled with the manifold member for measuring a concentration of fluid mixed in the mixing cavity. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of blending fluids,
a) measuring a concentration of a first fluid; -
b) measuring a concentration of a second fluid;
c) mixing the first and second fluids;
d) measuring a concentration of a mixture of the first and second fluids;
e) controlling flow of the first and second fluids to be mixed based on the concentrations of the first fluid, the second fluid and the mixture. - View Dependent Claims (32, 33, 34, 35)
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36. A fluid concentration sensing arrangement comprising:
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a) a flow member having an inlet opening, an outlet opening and a cavity disposed between the inlet opening and the outlet opening;
b) a fluid concentration sensor assembled with the flow member c) a crystal window fixed to the fluid concentration sensor such that the crystal window is in communication with the cavity. - View Dependent Claims (37, 38, 39)
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40. A method of assembling a fluid concentration sensing arrangement comprising:
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a) fixing a fluid concentration sensor to a sapphire window;
b) clamping the fluid concentration sensor and sapphire window to a flow member having an inlet opening, an outlet opening and a generally bowl shaped cavity disposed between the inlet opening and the outlet opening, such that the sapphire window is in communication with the bowl shaped cavity.
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41. An immersion lithography etching arrangement comprising:
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a liquid;
a substrate, immersed in said liquid;
an optical lithography etching lens immersed in said liquid and arranged to etch a pattern in the substrate;
an optical sensor, immersed in the liquid to detect characteristics of the liquid. - View Dependent Claims (42, 43)
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44. A method of etching a semiconductor substrate comprising:
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immersing the substrate in a liquid;
emitting radiation through the liquid to etch the surface of the substrate;
detecting an optical characteristic of the liquid, wherein the optical characteristic relates to the presence of impurities in the refracting fluid;
comparing the optical characteristic to a predetermined limit value associated with a limit amount of contamination in the liquid;
providing a signal that the limit amount of contamination has been reached when the predetermined limit value is reached.
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Specification