Stray field shielding structure for semiconductors

  • US 20060205177A1
  • Filed: 03/08/2005
  • Published: 09/14/2006
  • Est. Priority Date: 03/08/2005
  • Status: Active Grant
First Claim
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1. A method of making a stray field shielding structure comprising the steps of:

  • bonding a sheet of stray field shielding material to a stable host carrier to provide a laminated panel, applying a photo-resist film onto the top of said stray field shielding material to provide an array pattern of a plurality of individual shielding structures and expose streets of shielding material, removing said exposed streets of shielding material separating individual shielding structures, removing said photo-resist film from the top of said individual shielding structures, bonding an adhesive film supported on a flexible wafer film to the top of the individual shielding structures that are supported by the stable host carrier, and removing said stable host carrier to provide a plurality of inverted individual shielding structures that are removable from said flexible wafer film by bonding means.

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