Apparatus for servicing a plasma processing system with a robot

• US 20060218680A1
• Filed: 03/28/2005
• Published: 09/28/2006
• Est. Priority Date: 03/28/2005
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Bailey, Andrew D. III
• Application Number:
  US11/092,848
• Publication Number:
  US 20060218680A1
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: B08B 1/00 Cleaning by methods involving the use of tools cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00
• CPC Class Codes: B08B 9/00 Cleaning hollow articles by methods or apparatus specially adapted thereto B08B6/00 takes precedence
• CPC Class Codes: B25J 5/00 Manipulators mounted on wheels or on carriages B25J1/00 takes precedence; programme-controlled manipulators B25J9/00 ; vehicle aspects B60, B62, e.g. remote-controlled steering for motor vehicles B62D1/24; control of position of vehicles G05D1/00
• CPC Class Codes: H01J 37/32743 for introducing the material into processing chamber
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts
• CPC Class Codes: H01L 21/67751 vertical transfer of a single workpiece
• CPC Class Codes: Y10T 29/49723 including reconditioning of part

Abstract

A robot apparatus for executing a set of service procedures on a plasma processing system including a docking port is disclosed. The apparatus includes a platform and a docking probe coupled to the platform, wherein the docking probe is configured to dock with the docking port. The apparatus also includes a robot arm coupled to the platform, and further configured to substantially perform the set of service procedures, and a tool coupled to the robot arm. The apparatus further includes a computer coupled to the platform, wherein the computer is further configured to execute the set of service procedures, and wherein when the docking probe is docked to the docking port, the set of service procedures is performed by the tool.

Claims

1. A robot apparatus for executing a set of service procedures on a plasma processing system including a docking port, comprising:

a platform;

a docking probe coupled to said platform, wherein said docking probe is configured to dock with said docking port;

a robot arm coupled to said platform, and further configured to substantially perform said set of service procedures;

a tool coupled to said robot arm; and

a computer coupled to said platform, wherein said computer is further configured to execute said set of service procedures;

wherein when said docking probe is docked to said docking port, said set of service procedures is performed by said tool.

2. The apparatus of claim 1, wherein said set of service procedure is performed in-situ.

3. The apparatus of claim 1, wherein said set of service procedure includes one of a cleaning procedure, a plasma chamber part removal procedure, a plasma chamber part placing procedure, a plasma chamber part aligning procedure, and a hazardous duty procedure.

4. The apparatus of claim 1, wherein said set of service procedures is stored in one of said plasma processing system and a networked server.

5. The apparatus of claim 1, wherein a plasma processing system operator can enter said set of service procedures into said robot device.

6. The apparatus of claim 1, wherein said platform is an ambulatory platform configured to transport said robot device to said plasma processing system.

7. The apparatus of claim 1, wherein said robot arm is a jointed arm.

8. The apparatus of claim 1, wherein said robot arm has greater than five degrees of freedom.

9. The apparatus of claim 1, wherein said robot apparatus includes a set of sensors.

10. A robot apparatus for a plasma processing system including a set of plasma chamber surfaces and a docking port, comprising:

an ambulatory platform;

a docking probe coupled to said ambulatory platform, wherein said docking probe is configured to dock with said docking port;

a jointed arm coupled to said ambulatory platform, and further configured to substantially remove a set of byproduct deposits from said set of plasma chamber surfaces;

a tool coupled to said jointed arm; and

a computer coupled to said ambulatory platform, wherein said computer is further configured to execute a set of cleaning procedures;

wherein when said docking probe is docked to said docking port, said a set of byproduct deposits are substantially removed.

11. The apparatus of claim 10, wherein said set of byproduct deposits are substantially removed in-situ.

12. The apparatus of claim 10, wherein said robot apparatus is further configured to expose said set of plasma chamber surfaces to said jointed arm.

13. The apparatus of claim 10, wherein said tool includes one of an abrasive pad and a wiper.

14. The apparatus of claim 10, wherein said ambulatory platform is configured to transport said robot device to said plasma processing system.

15. The apparatus of claim 10, wherein said robot device includes a container that is accessible to said jointed arm, said container is configured to store and replace a set of contaminated plasma chamber parts and a set of cleaned plasma chamber parts.

16. A robot apparatus for a plasma processing system including a set of plasma chamber surfaces and a docking port, comprising:

a jointed arm coupled to said plasma processing system, and further configured to substantially clean said set of plasma chamber surfaces, wherein said jointed arm has at least five degrees of freedom;

a tool coupled to said jointed arm; and

a computer coupled to said plasma processing system, wherein said computer is further configured to execute a set of cleaning procedures for removal of a set of byproduct deposits;

wherein when said set of cleaning procedures is executed, said set of plasma chamber surfaces is substantially cleaned.

17. The apparatus of claim 16, wherein said set of byproduct deposits are substantially removed in-situ.

18. The apparatus of claim 16, wherein said robot apparatus is further configured to expose said set of plasma chamber surfaces to said jointed arm.

19. The apparatus of claim 16, wherein said tool includes one of an abrasive pad and a wiper.

20. The apparatus of claim 16, wherein said robot device includes a container that is accessible to said jointed arm, said container is configured to store and replace a set of contaminated plasma chamber parts and a set of cleaned plasma chamber parts.