Pressure sensor with conductive laminate membrane

  • US 20060225494A1
  • Filed: 05/30/2006
  • Published: 10/12/2006
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
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First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a chamber partially defined by a conductive membrane having a laminate structure;

    fluid at a reference pressure sealed within the chamber such that the conductive membrane deflects from pressure differences between the reference pressure and the fluid pressure; and

    , associated circuitry incorporating the conductive membrane to convert its deflection into an output signal indicative of the fluid pressure.

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