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PIEZOELECTRIC DIAPHRAGM WITH APERTURE(S)

  • US 20060232167A1
  • Filed: 04/13/2006
  • Published: 10/19/2006
  • Est. Priority Date: 04/13/2005
  • Status: Abandoned Application
First Claim
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1. A piezoelectric diaphragm member comprising a membrane comprising a piezoelectric layer, the membrane having a diaphragm aperture provided therein.

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