PIEZOELECTRIC DIAPHRAGM WITH APERTURE(S)
First Claim
1. A piezoelectric diaphragm member comprising a membrane comprising a piezoelectric layer, the membrane having a diaphragm aperture provided therein.
3 Assignments
0 Petitions
Accused Products
Abstract
A piezoelectric diaphragm member (23) has an aperture (25). Preferably the piezoelectric diaphragm (23) is a multi-layer composite which includes a piezoelectric wafer layer. In some embodiments, the aperture (25) in the piezoelectric diaphragm accommodates a diaphragm accessory or fixture. The diaphragm accessory or fixture is preferably inserted through the plural layers of the multi-layer composite piezoelectric diaphragm member, and as such has an accessory or fixture body suitably sized for snug (e.g., fluid-tight) insertion or adhesion into the diaphragm aperture. Within its periphery the accessory or fixture body can include a feature such as a valve (e.g., ball valve, duckbill, flapper valve) or a projection (e.g., a stud or standoff, for example). The projection of the fixture or accessory can be configured, arranged, or adapted to engage or actuate further apparatus. In other embodiments, the aperture (25) in the piezoelectric diaphragm (23) is selectively opened and closed by a closure member such as a valve flap (27) which acts in response to movement of the piezoelectric diaphragm (23).
52 Citations
17 Claims
- 1. A piezoelectric diaphragm member comprising a membrane comprising a piezoelectric layer, the membrane having a diaphragm aperture provided therein.
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12. A method of making diaphragms comprising
providing plural piezoelectric diaphragm members, each of the piezoelectric diaphragm members having an aperture extending in a thickness direction of the piezoelectric diaphragm member, the aperture of each of the plural piezoelectric diaphragm members having an essentially same aperture size; -
selecting a selected type of diaphragm fixture from plural diaphragm fixture types, the diaphragm fixtures of each of the plural diaphragm fixture types having essentially a same fixture size suitable for insertion into the aperture of each of the plural piezoelectric diaphragm members;
inserting diaphragm fixtures of the selected type into at least some of the plural piezoelectric diaphragm members. - View Dependent Claims (13, 14)
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15. A pump comprising:
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a pump body having an inlet port and an opposed outlet port;
a piezoelectric diaphragm member positioned internally in the pump body for at least partially defining an intake chamber substantially between the inlet port and the piezoelectric diaphragm and for at least partially defining an exhaust chamber substantially between the outlet port and the piezoelectric diaphragm, the piezoelectric diaphragm member having a diaphragm aperture provided therein;
wherein the piezoelectric diaphragm member carries a valve flap for selectively opening and closing the diaphragm aperture in response to movement of the piezoelectric diaphragm and thereby selectively allowing fluid communication between the intake chamber and the exhaust chamber. - View Dependent Claims (16, 17)
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Specification