Heating apparatus and driving method therefor
First Claim
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1. A heating apparatus comprising:
- a heating plate on which an object to be heated is loaded and which is partitioned into a plurality of heating zones;
a main heating apparatus that is placed on a lower portion of the heating plate and uniformly heats the entire heating plate; and
a plurality of subheaters located below the heating plate and disposed to respectively correspond to the heating zones, such that each of the subheaters heats a corresponding one of the heating zones.
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Abstract
A heating apparatus and a method of driving the same. The heating apparatus includes: a heating plate on which an object to be heated is loaded and which is partitioned into a plurality of heating zones; a main heating apparatus that is placed on a lower portion of the heating plate and uniformly heats the entire heating plate; and a plurality of subheaters located below the heating plate and disposed to respectively correspond to the heating zones, such that each of the subheaters heats a corresponding one of the heating zones.
12 Citations
7 Claims
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1. A heating apparatus comprising:
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a heating plate on which an object to be heated is loaded and which is partitioned into a plurality of heating zones;
a main heating apparatus that is placed on a lower portion of the heating plate and uniformly heats the entire heating plate; and
a plurality of subheaters located below the heating plate and disposed to respectively correspond to the heating zones, such that each of the subheaters heats a corresponding one of the heating zones. - View Dependent Claims (2, 3, 4, 5, 6)
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7. The driving method of 6, wherein the main heating apparatus heats the heating plate to the lowest target temperature set for the heating zones.
Specification