Heating apparatus and driving method therefor

  • US 20060237421A1
  • Filed: 04/05/2006
  • Published: 10/26/2006
  • Est. Priority Date: 04/07/2005
  • Status: Abandoned Application
First Claim
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1. A heating apparatus comprising:

  • a heating plate on which an object to be heated is loaded and which is partitioned into a plurality of heating zones;

    a main heating apparatus that is placed on a lower portion of the heating plate and uniformly heats the entire heating plate; and

    a plurality of subheaters located below the heating plate and disposed to respectively correspond to the heating zones, such that each of the subheaters heats a corresponding one of the heating zones.

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