Accelerated particle and high energy radiation sensor
First Claim
1. A monolithic sensor adapted for use in the detection of accelerated particles or high energy radiation, the sensor comprising a charge carrier transport layer, the charge carrier transport layer having dopants of a first conductivity type;
- at least one first well having dopants of the first conductivity type at a higher concentration than the charge carrier transport layer and having integrated therein readout circuitry;
at least one second well having dopants of a second conductivity type forming a first junction with the charge carrier transport layer whereby when charge carriers are generated in the charge carrier transport layer, the charge carriers move towards and are collected at the junction between the charge carrier transport layer and the second well to generate a signal and wherein the sensor is capable of withstanding bombardment by accelerated particles or high energy radiation.
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Accused Products
Abstract
An accelerated electron detector comprises an array of monolithic sensors in a CMOS structure, each sensor comprising a substrate (10), an epi layer (11), a p+ well (12) and n+ wells (13) which are separated from the p+ well (12) by the epi layer (11). Integrated in the p+ well are a plurality of NMOS transistors. The sensor also includes a deep n region (15) beneath the p+ well (12) which establishes within the epi layer a depletion layer so that on application of a biasing voltage charge carriers generated in the epi layer are caused to drift to the n+ well (13). The detector has improved radiation hardness and it therefore suitable for the detection and imaging of accelerated electrons such as in electron microscopes.
57 Citations
23 Claims
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1. A monolithic sensor adapted for use in the detection of accelerated particles or high energy radiation, the sensor comprising a charge carrier transport layer, the charge carrier transport layer having dopants of a first conductivity type;
- at least one first well having dopants of the first conductivity type at a higher concentration than the charge carrier transport layer and having integrated therein readout circuitry;
at least one second well having dopants of a second conductivity type forming a first junction with the charge carrier transport layer whereby when charge carriers are generated in the charge carrier transport layer, the charge carriers move towards and are collected at the junction between the charge carrier transport layer and the second well to generate a signal and wherein the sensor is capable of withstanding bombardment by accelerated particles or high energy radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
- at least one first well having dopants of the first conductivity type at a higher concentration than the charge carrier transport layer and having integrated therein readout circuitry;
Specification