Batch-fabricated flexible intraocular retinal prosthesis system and method for manufacturing the same

• US 20060282128A1
• Filed: 04/28/2006
• Published: 12/14/2006
• Est. Priority Date: 04/28/2005
• Status: Active Grant

• Current Assignee: California Institute of Technology, University of Southern California
• Original Assignee: California Institute of Technology, University of Southern California
• Inventors: Tai, Yu-Chong, Weiland, James D., Li, Wen, Humayun, Mark, Rodger, Damien C., Ameri, Hossein
• Granted Patent: US 7,774,931 B2
• Time in Patent Office: Days
• US Class Current: 607/53
• CPC Class Codes: A61F 9/08 Devices or methods enabling eye-patients to replace direct visual perception by another kind of perception
• CPC Class Codes: A61N 1/0543 Retinal electrodes
• CPC Class Codes: A61N 1/36046 of the eye
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49156 with selective destruction of conductive paths
• CPC Class Codes: Y10T 29/49224 with coating

Abstract

Intraocular retinal prosthesis systems and methods for fabricating the same are provided. In one aspect, fabrication of all or multiple components of a prosthesis device or system are combined into a single monolithic fabrication process. Also, many such entire systems can be fabricated simultaneously in a single microfabrication processing run. A prosthesis device includes a cable region that connects an electrode array region with a power and data management region. The electrode array region includes one or more arrays of exposed electrodes, and the power and data management region includes various power and control elements. The power and data management elements, in one aspect, include an RF coil or coils and circuit arrangements and/or chips configured to provide drive signals to the electrodes via a cable and receive power and signals from the RF coil or coils. Each region includes elements fabricated on or in a single polymer layer during the same fabrication process.

Claims

1. A method of fabricating an integrated intraocular retinal prosthesis device having an electrode array region, a power and data management region and a cable region connecting the electrode region with the power and data management region, the method comprising:

forming a patterned layer of conductive material on a first layer of polymer material, said patterned conductive layer defining circuit elements of the power and data management region, the electrode region and the cable region;

covering the patterned conductive layer with a second polymer layer; and

removing a portion of the second polymer layer in the electrode array region so as to expose at least a portion of the patterned conductive layer to form an exposed electrode array.

2. The method of claim 1, wherein the conductive material comprises carbonized parylene.

3. The method of claim 1, wherein the conductive material comprises a conductive metal selected from the group consisting of gold, platinum, chromium, titanium, platinum and iridium oxide.

4. The method of claim 1, wherein the first polymer layer and the second polymer layer each comprise one or more of parylene A, parylene C, parylene AM, parylene F, parylene N, parylene HT or parylene D.

5. The method of claim 1, wherein the circuit elements of the power and data management region include one or more RF coil elements formed of the conductive material.

6. The method of claim 5, wherein the device includes one or more retention elements configured to retain the RF coil elements in an implant region of an eye.

7. The method of claim 1, wherein forming the patterned conductive layer comprises:

depositing a layer of photoresist on the polymer layer;

patterning the photoresist with a mask;

removing the patterned photoresist to expose the polymer layer;

depositing the conductive material on the exposed polymer layer; and

removing the photoresist.

8. The method of claim 7, wherein depositing the conductive material includes one of an e-beam evaporation process, a sputtering process or an electroplating process.

9. The method of claim 1, further comprising:

depositing a layer of photoresist on a substrate; and

forming the first layer of polymer material on the photoresist.

12. The method of claim 1, wherein the cable region includes one or more conductive lines formed of the conductive material, said lines coupling the electrode array with one or more circuit elements in the power and data management region.

13. The method of claim 1, wherein the circuit elements of the power and data management region include one of a chip or a circuit arrangement configured to provide control signals to the electrode array.

14. The method of claim 1, wherein the exposed electrode array includes electrodes arranged in a pattern that mimics the density pattern of ganglion cells in a retina.

15. The method of claim 1, wherein the exposed electrode array includes electrodes arranged in a pattern having an irregular density.

16. The method of claim 1, wherein removing a portion of the polymer layer comprises:

depositing a layer of photoresist on the polymer layer;

patterning the photoresist with a mask;

removing the patterned photoresist to expose portions of the polymer layer; and

etching the exposed portions of the polymer layer.

10. The method of claim 10, wherein the substrate comprises a material selected from the group consisting of silicon, glass, and quartz.

11. The method of claim 10, further comprising removing the photoresist layer so as to separate the device from the substrate.

17. An integrated intraocular retinal prosthesis device formed on a layer of polymer material, comprising:

a first region including a plurality of electrodes;

a second region including one or more RF coils;

a plurality of control circuit elements coupled with the one or more RF coils; and

a third region including an interconnect medium including one or more conductive lines that couple the electrodes with the plurality of control circuit elements;

wherein the control circuit elements and each of the three regions are fabricated on or in the same polymer layer.

18. The device of claim 17, wherein exposed portions of the electrodes are arranged in a pattern that mimics the density pattern of ganglion cells in a retina.

19. The device of claim 17, wherein exposed portions of the electrodes are arranged in a pattern having an irregular density.

20. A device according to claim 17 implanted in an eye, wherein the first region is located proximal to the retina, and wherein the second region is located within or proximal to a capsular bag region of the eye.

21. The device of claim 17, wherein all or a portion of the plurality of control circuit elements are located in the third region.

22. The device of claim 17, wherein the polymer layer comprises one of parylene A, parylene C, parylene AM, parylene F, parylene N, parylene HT or parylene D.

23. The device of claim 17, wherein the second region includes one or more retention elements configured to retain the RF coils in an implant region of an eye.

24. The device of claim 17, wherein all or a portion of the plurality of control circuit elements are located in the second region.