Film bulk acoustic wave resonator and manufacturing method thereof
First Claim
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1. A film bulk acoustic resonator comprising:
- a substrate;
a lower electrode formed on top of the substrate;
a piezoelectric membrane formed on top of the lower electrode and having a crystallographic axis so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode; and
an upper electrode formed on top of the piezoelectric membrane.
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Abstract
A film bulk acoustic resonator includes a substrate; a lower electrode formed on top of the substrate; a piezoelectric membrane formed on top of the lower electrode and having a crystallographic axis so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode; and an upper electrode formed on top of the piezoelectric membrane.
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14 Claims
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1. A film bulk acoustic resonator comprising:
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a substrate;
a lower electrode formed on top of the substrate;
a piezoelectric membrane formed on top of the lower electrode and having a crystallographic axis so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode; and
an upper electrode formed on top of the piezoelectric membrane. - View Dependent Claims (2, 3, 8, 9, 10, 11)
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4. A manufacturing method of film bulk acoustic resonator comprising the steps of:
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forming a lower electrode on top of a substrate;
forming a piezoelectric membrane on top of the lower electrode and having a crystallographic axis so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode; and
forming an upper electrode on top of the piezoelectric membrane. - View Dependent Claims (5, 6, 7, 12, 13, 14)
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Specification