Coated article with low-E coating including zirconium silicon oxynitride and methods of making same
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Accused Products
Abstract
A coated article is provided with at least one infrared (IR) reflecting layer. In certain embodiments, the coating is provided with at least one layer of zirconium silicon oxynitride (e.g., ZrSiOxNy), for improving the coated article'"'"'s ability to block of UV radiation. The oxygen content of the layer may be adjusted in order to tune the coating'"'"'s visible transmission versus UV blockage.
53 Citations
39 Claims
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1-25. -25. (canceled)
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26. A method of making a coated article, the method comprising:
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providing a substrate;
sputtering a target comprising zirconium and silicon in an atmosphere comprising oxygen and nitrogen in order to form a layer comprising zirconium silicon oxynitride; and
providing an IR reflecting layer on the substrate over or under the layer comprising zirconium silicon oxynitride. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A method of making a coated article, the method comprising:
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providing a glass substrate;
sputtering a target comprising zirconium and silicon in an atmosphere comprising oxygen and nitrogen in order to form at least one layer comprising zirconium silicon oxynitride;
providing an IR reflecting layer on the substrate over and/or under the layer comprising zirconium silicon oxynitride; and
wherein the layer comprising zirconium silicon oxynitride contains more zirconium than silicon. - View Dependent Claims (38, 39)
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Specification