Breath-mode ring resonator structure, and method of designing, operating and using same
First Claim
1. A MEMS ring resonator, comprising:
- a MEMS ring resonator structure including;
an outer surface, wherein the outer surface includes a circular or substantially circular shape having an outer radius of curvature; and
an inner surface, wherein the inner surface includes a circular or substantially circular shape having an inner radius of curvature;
an anchor support element including an impedance matching structure; and
wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode.
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Accused Products
Abstract
There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to one or more microelectromechanical ring resonator structures having a circular or substantially circular outer surface and a circular or substantially circular inner surface. The microelectromechanical ring resonator(s) include an anchor support element having an impedance matching structure coupled to at least one substrate anchor. The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator(s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode. In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode). In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.
34 Citations
20 Claims
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1. A MEMS ring resonator, comprising:
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a MEMS ring resonator structure including;
an outer surface, wherein the outer surface includes a circular or substantially circular shape having an outer radius of curvature; and
an inner surface, wherein the inner surface includes a circular or substantially circular shape having an inner radius of curvature;
an anchor support element including an impedance matching structure; and
wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A MEMS ring resonator comprising:
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a MEMS ring resonator structure including;
an outer surface, wherein the outer surface includes a circular or substantially circular shape having a radius of curvature; and
an inner surface, wherein the inner surface includes a circular or substantially circular shape having a radius of curvature;
an anchor support element including an impedance matching structure; and
wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode;
at least one sense electrode;
at least one drive electrode, wherein the sense and drive electrodes are juxtaposed one of the surfaces of the MEMS ring resonator structure; and
sense circuitry, coupled to the sense electrodes, to provide an output signal. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification