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Breath-mode ring resonator structure, and method of designing, operating and using same

  • US 20070052498A1
  • Filed: 09/02/2005
  • Published: 03/08/2007
  • Est. Priority Date: 09/02/2005
  • Status: Active Grant
First Claim
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1. A MEMS ring resonator, comprising:

  • a MEMS ring resonator structure including;

    an outer surface, wherein the outer surface includes a circular or substantially circular shape having an outer radius of curvature; and

    an inner surface, wherein the inner surface includes a circular or substantially circular shape having an inner radius of curvature;

    an anchor support element including an impedance matching structure; and

    wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode.

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