System and method for charge control in a MEMS device

• US 20070058095A1
• Filed: 11/04/2005
• Published: 03/15/2007
• Est. Priority Date: 05/05/1994
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Miles, Mark
• Granted Patent: US 8,014,059 B2
• Time in Patent Office: Days
• US Class Current: 349/1
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 6/12 of the integrated circuit kind electric integrated circuits H01L27/00
• CPC Class Codes: G02F 1/13725 based on guest-host interaction G02F1/13762, G02F1/13737, take precedence
• CPC Class Codes: G02F 1/213 Fabry-Perot type
• CPC Class Codes: G02F 1/216 using liquid crystals, e.g. liquid crystal Fabry-Perot filters
• CPC Class Codes: G02F 2203/03 scattering
• CPC Class Codes: G02F 2203/09 transflective
• CPC Class Codes: G06F 3/1431 using a single graphics controller
• CPC Class Codes: G06F 3/1446 display composed of modules, e.g. video walls
• CPC Class Codes: G06F 3/147 using display panels
• CPC Class Codes: G09G 2300/0408 Integration of the drivers onto the display substrate
• CPC Class Codes: G09G 2300/0452 Details of colour pixel setup, e.g. pixel composed of a red, a blue and two green components
• CPC Class Codes: G09G 2300/06 : Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 2360/142 : the light being detected by light detection means within each pixel
• CPC Class Codes: G09G 3/001 : using specific devices not provided for in groups G09G3/02 - G09G3/36, e.g. using an intermediate record carrier such as a film slide; Projection systems; Display of non-alphanumerical information, solely or in combination with alphanumerical information, e.g. digital display on projected diapositive as background slide projectors per se G03B23/00 = 42 HP
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/2074 : using sub-pixels
• CPC Class Codes: G09G 3/2077 : by a combination of two or more gradation control methods
• CPC Class Codes: G09G 3/22 : using controlled light sources
• CPC Class Codes: G09G 3/34 : by control of light from an independent source
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: G09G 5/02 : characterised by the way in which colour is displayed details of colour display specific for CRTs G09G1/28; specific for flat matrix panels other than liquid crystal displays G09G3/2003; specific for liquid crystal displays G09G3/3607

Abstract

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

Claims

1. An electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector and a second reflector defining an optical cavity therebetween and selective of a visible wavelength at an intensity by optical interference; and

,

a charge-controlling mechanism to allow optical properties of the optical cavity to be varied by controlling a predetermined amount of charge stored on the first and the second reflectors, without specifically controlling voltage between the first and the second reflectors, such that at least one of the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

2. The electronic device of claim 1, wherein the mechanism comprises a charge-sharing capacitor.

3. The electronic device of claim 2, wherein the mechanism further comprises a voltage source and a second capacitor in parallel with the first reflector and the second reflector, the mechanism switching between the voltage source and the charge-sharing capacitor, the second capacitor, the first reflector, and the second reflector.

4. The electronic device of claim 1, wherein the mechanism comprises a controlled current source and circuitry for controlling a time interval that the current source is applied to the first reflector and the second reflector.

5. The electronic device of claim 1, wherein the first reflector is a top, semi-reflective reflector, and the second reflector is a bottom, highly reflective reflector.

6. The electronic device of claim 1, wherein the mechanism allows a thickness of the optical cavity to be varied to variably select at least one of the visible wavelength and the intensity.

7. The electronic device of claim 1, wherein the mechanism comprises a flexure operatively coupled to one of the first and the second reflectors.

8. The electronic device of claim 7, wherein the flexure is a non-linear flexure that has non-linear spring functionality.

9. The electronic device of claim 1, wherein the optical cavity operates in accordance with a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another, such that a thickness of the optical cavity therebetween is controllable by the mechanism to select color.

10. The electronic device of claim 1, wherein the optical cavity has a sufficiently great thickness to produce an order of spectral response of a color corresponding to the visible wavelength that is greater than one.

11. The electronic device of claim 1, further comprising a third reflector between the first reflector and the second reflector such that the optical cavity encompasses a first gap between the first reflector and the third reflector and a second gap between the third reflector and the second reflector.

12. The electronic device of claim 1, wherein the optical cavity is analog, such that both the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

13. The electronic device of claim 1, wherein the optical cavity is digital and operates in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

14. The electronic device of claim 1, wherein the optical cavity is digital, such that the visible wavelength of which the optical cavity is selective is fixed as a color component wavelength, and the intensity of the color component wavelength is variably selectable in correspondence with a corresponding color component of the pixel of the displayable image.

15. The electronic device of claim 1, wherein the optical cavity is one of reflectively selective and transmissively selective.

16. An electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector and a second reflector defining an optical cavity therebetween and selective of a visible wavelength at an intensity by optical interference; and

,

means for controlling a predetermined amount of charge stored on the first and the second reflectors, without specifically controlling voltage between the first and the second reflectors, to vary optical properties of the optical cavity to variably select at least one of the visible wavelength and the intensity in correspondence with the pixel of the displayable image.

17. The electronic device of claim 16, wherein a thickness of the optical cavity is variable.

18. The electronic device of claim 16, further comprising a non-linear flexure having non-linear spring functionality.

19. The electronic device of claim 16, wherein the optical cavity is operable in a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another.

20. The electronic device of claim 16, wherein the optical cavity has a sufficiently great thickness to produce an order of spectral response of a color corresponding to the visible wavelength that is greater than one.

21. The electronic device of claim 16, further comprising a third reflector between the first reflector and the second reflector such that the optical cavity encompasses a first gap between the first reflector and the third reflector and a second gap between the third reflector and the second reflector.

22. The electronic device of claim 16, wherein the optical cavity is operable in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

23. A display device comprising:

a plurality of electrically adjustable optical resonant cavities to correspondingly display a plurality of pixels of a displayable image by optical interference such that the plurality of cavities are digital, such that the plurality of cavities are divided into a plurality of cavity groups, each cavity group variably selecting a visible wavelength at an intensity corresponding to a color and an intensity of a corresponding pixel of the displayable image; and

at least one charge-controlling mechanism to allow optical properties of the optical resonant cavities to be varied by controlling a predetermined amount of charge stored over the cavities, without specifically controlling voltage over the cavities.

24. The display device of claim 23, wherein each cavity group comprises a sub-plurality of the plurality of cavities, each cavity of the sub-plurality of each cavity group selecting a different static color wavelength at a variably intensity corresponding to a different color component of a pixel of the displayable image to which the cavity group corresponds.

25. The display device of claim 23, wherein each of at least one of the plurality of cavities operates in three different states.

26. The display device of claim 23, wherein the plurality of cavities are each of one of a plurality of types, each of the plurality of types having three different operable states.

27. The display device of claim 23, wherein each cavity group comprises a red wavelength-selecting cavity selecting a red intensity corresponding to a red color component of a pixel of the displayable image to which the cavity group corresponds, a green wavelength-selecting cavity selecting a green intensity corresponding to a green color component of a pixel of the displayable image to which the cavity group corresponds, and a blue wavelength-selecting cavity selecting a blue intensity corresponding to a blue color component of a pixel of the displayable image to which the cavity group corresponds.

28. The display device of claim 23, further comprising, for each optical resonant cavity, a first reflector and a second reflector defining the optical resonant cavity therebetween, and a flexure operatively coupled to one of the first and the second reflectors.

29. The display device of claim 28, wherein the flexure has a non-linear spring functionality.

30. The display device of claim 28, wherein each optical resonant cavity is operable in a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another.

31. The display device of claim 28, wherein each optical resonant cavity has a sufficiently great thickness to produce an order of spectral response greater than one.

32. The display device of claim 28, further comprising, for each optical resonant cavity, a third reflector between the first and the second reflectors, such that each optical resonant cavity encompasses a first gap between the first and the third reflectors and a second gap between the third and the second reflectors.

33. A method comprising:

for each pixel of a pixilated displayable image, controlling a predetermined amount of charge over one or more corresponding optical resonant cavities, without specifically controlling voltage over the cavities, to select a corresponding visible wavelength at a corresponding intensity by optical interference to display the pixel.

34. The method of claim 33, further comprising providing light for illumination of the corresponding visible wavelength.

35. The method of claim 33, further initially comprising dividing a displayable image into the pixilated displayable image.

36. The method of claim 33, wherein controlling the predetermined amount of charge over the one or more corresponding optical resonant cavities comprises, for each pixel:

for a red color wavelength, controlling the predetermined amount of charge over a first optical resonant cavity to select a red intensity corresponding to a red color component of the pixel;

for a green color wavelength, controlling the predetermined amount of charge over a second optical resonant cavity to select a green intensity corresponding to a green color component of the pixel; and

,

for a blue color wavelength, controlling the predetermined amount of charge over a third optical resonant cavity to select a blue intensity corresponding to a blue color component of the pixel.

37. An electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector, a second reflector, and a third reflector in between the first and the second reflectors defining an optical cavity inclusive of a first gap between the first reflector and the third reflector, and a second gap between the second reflector and the third reflector, the optical cavity selective of a visible wavelength at an intensity by optical interference; and

,

a mechanism to allow optical properties of the optical cavity to be varied by controlling a predetermined amount of charge stored over the cavity, without specifically controlling voltage over the cavity, such that at least one of the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

38. The electronic device of claim 37, wherein the optical cavity is analog, such that both the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

39. The electronic device of claim 37, wherein the optical cavity is digital and operates in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

40. The electronic device of claim 37, wherein the optical cavity is digital, such that the visible wavelength of which the optical cavity is selective is fixed as a color component wavelength, and the intensity of the color component wavelength is variably selectable in correspondence with a corresponding color component of the pixel of the displayable image.

41. The electronic device of claim 37, wherein the optical cavity is one of reflectively selective and transmissively selective.

42. A charge control circuit, comprising:

a switch circuit having an input node configured to receive a reference voltage at a selected voltage level and configured to respond to a charge signal to pre-charge said input node with a pulse charge at said selected voltage level; and

wherein said switch circuit further includes a single switch configured to respond to an enable signal having a variable capacitor with first and second plates and wherein said single switch is coupled to said MEM device to apply said selected voltage level across first and second plates of a variable capacitor of said MEM device for said duration to thereby cause said pulse charge to accumulate on said variable capacitor.

43. The charge control circuit of claim 42, wherein said single switch comprises a transistor.

44. The charge control circuit of claim 42, wherein said single switch is a first switch, and said switch circuit further comprises a second switch coupled to said input node and said first switch such that said first switch is between said MEM device and said second switch and wherein said second switch is configured to close to provide said reference voltage to said input node in response to said charge enable signal to charge said input node with said pulse charge.

45. The charge control circuit of claim 44, wherein said switch circuit further comprises a third switch such that said first, second and third switches are on separate branches connecting to said input node.

46. The charge control circuit of claim 45, wherein said first switch is configured to close in response to an enable signal and said third switch is configured to close in response to a clear signal.

47. The charge control circuit of claim 46, wherein closing said first switch in response to said enable signal after charging said input node applies said selected voltage level across said first and second plates.

48. The charge control circuit of claim 45, wherein opening said second switch and closing said first and third switches provides a path between said first plate and a clear voltage for clearing charge from said first plate.

49. The charge control circuit of claim 45, wherein said first, second, and third switches comprise p-channel metal oxide semiconductor devices.

50. The charge control circuit of claim 45, wherein said first, second and third switches comprise n-channel metal oxide semiconductor devices.

51. The charge control circuit of claim 42, further comprising a variable power supply coupled to said input node and configured to provide said reference voltage at said selected voltage level.

52. The change control circuit of claim 51, further comprising a controller configured to provide said charge signal, said enable signal, and a clear signal to control said selected voltage level provided by said variable power supply.

53. A micro-electromechanical cell, comprising:

a micro-electromechanical (MEM) device having a variable capacitor formed by a first conductive plate and a second conductive plate separated by a variable gap distance; and

a switch circuit having an input node configured to receive a reference voltage at a selected voltage level and configured to respond to a charge signal to pre-charge said input node with a pulse charge at said selected voltage level; and

wherein said switch circuit further includes only a first switch coupled to said variable capacitor configured to respond to an enable signal having a duration shorter than a mechanical time constant of a MEM device and coupled to said MEM device to apply said selected voltage level across first and second plates for said duration to thereby cause said pulse charge to accumulate on said variable capacitor.

54. The micro-electromechanical cell of claim 53, wherein said switch circuit comprises a second switch coupled to said first switch and configured to close to provide said reference voltage to said input node in response to said charge signal to charge said input node with said pulse charge.

55. micro-electromechanical cell of claim 54, further comprising a third switch coupled to said input node such that said first, second and third switches are on separate branches connecting to said input node.

56. micro-electromechanical cell of claim 55, wherein said first switch is configured to close in response to said enable signal and said third switch is configured to close in response to a clear signal.

57. micro-electromechanical cell of claim 55, wherein said first, second, and third switches comprise p-channel metal oxide semiconductor devices.

58. micro-electromechanical cell of claim 55, wherein said first, second and third switches comprise n-channel metal oxide semiconductor devices.

59. micro-electromechanical system, comprising:

an M-row by N-column array of a micro-electromechanical cells, wherein each cell includes a MEM device having a variable capacitor formed by a first conductive plate and a second conductive plate separated by a variable gap distance; and

a switch circuit having an input node configured to receive a reference voltage at a selected voltage level and configured to respond to a charge signal to pre-charge said input node with a pulse charge at said selected voltage level and wherein said switch circuit further comprises a single switch coupled to said variable capacitor and configured to respond to a enable signal having a duration shorter than a mechanical time constant of a MEM device and coupled to said MEM device to apply said selected voltage level across first and second plates of a variable capacitor of said MEM device for said duration to thereby cause said pulse charge to accumulate on said variable capacitor.

60. system of claim 59, wherein each of said M rows receives a separate enable signal and all of N switch circuits of a given row receive a same enable signal.

61. system of claim 59, wherein each of said N columns receives a separate reference voltage and all M switch circuits of a given column receive a same reference voltage, wherein each separate reference voltage can have a different selected voltage level.

62. system of claim 59, wherein each switch circuit is further configured to discharge a stored charge on the variable capacitor in response to said enable signal and a clear signal.

63. charge control circuit, comprising:

means for accumulating a charge;

means for transferring said charge to a variable capacitor;

means for reducing the capacitance of said means for transferring said charge; and

means for removing said charge from said variable capacitor.

64. method of controlling a micro-electromechanical device having a variable capacitor, comprising:

applying a voltage at a preselected voltage level to charge an input node;

providing an enable signal to a first switch to close said first switch for a duration less than the mechanical time constant of said micro-electromechanical device; and

applying said charge to said variable capacitor wherein said charge corresponds to a gap distance between first and second conductive plates of said variable capacitor and wherein said first switch is the only switch directly coupled to said variable capacitor.

65. method of claim 64, wherein applying said voltage comprises providing a charge enable signal to said first switch to close said first switch to an input voltage.

66. method of claim 65, further comprising providing an enable signal and a clear signal to close said first switch and a third switch respectively in order to clear a charge from said variable capacitor.

67. charge control circuit, comprising:

a switch circuit having an input node configured to receive a reference current at a selected current level and configured to respond to a charge signal to pre-charge said input node with a pulse current at said selected current level; and

wherein said switch circuit further comprises a first switch configured to respond to an enable signal having a duration shorter than a mechanical time constant of a micro-electromechanical device (MEM device) and coupled to said MEM device to apply said selected current level across first and second plates of a variable capacitor of said MEM device for said duration to thereby cause said pulse current to accumulate on said variable capacitor wherein the first switch is the only connected to said capacitor.

68. charge control circuit of claim 67, wherein said variable gap distance is a function of the magnitude of said stored charge.

69. charge control circuit of claim 67, wherein said switch circuit further comprises a second switch coupled to said MEM device and configured to close to provide said reference current to said input node in response to said charge signal to charge said input node with said pulse current.

70. charge control circuit of claim 69, further comprising a third switch coupled to said input node and a clear voltage.

71. charge control circuit of claim 70, wherein said first switch is configured to close in response to said enable signal and said third switch is configured to close in response to a clear signal.

72. charge control circuit of claim 71, wherein closing said second switch in response to said enable signal after charging said input node applies said selected current level across said first and second plates.

73. charge control circuit of claim 70, wherein opening said first switch and closing said second and third switches provides a path between said first plate and said clear voltage for clearing charge from said first plate.

74. charge control circuit of claim 70, wherein said first, second, and third switches comprise p-channel metal oxide semiconductor devices.

75. charge control circuit of claim 70, wherein said first, second and third switches comprise n-channel metal oxide semiconductor devices.

76. method of controlling a micro-electromechanical system (MEMS) device having a variable capacitor defining a variable gap distance, comprising:

applying a reference voltage having a selected voltage level across the MEMS device so as to cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of magnitude of the stored charge.

77. method of claim 76, further comprising:

removing a stored charge on the variable capacitor prior to applying the reference voltage across the micro-electromechanical device.

78. method of controlling a MEMS actuator having a pair of plates with a gap therebetween supported by a spring mechanism having a mechanical time constant, comprising:

applying a isolatable voltage to the pair of plates to select a desired gap size by having a reference voltage applied then removing the reference voltage after a desired charge has been applied to the pair of plates.

79. method of claim 78, further comprising:

removing the desired charge accumulated between the first plate and the second plate.

80. method of controlling a MEMS actuator having a first plate and a second plate with a restoring force applied to a gap therebetween, the second plate coupled to ground, comprising:

switching a reference voltage across the first plate and ground;

accumulating a desired charge on the first plate and second plate; and

decoupling the reference voltage from the first plate.

81. method of claim 80, further comprising:

switching the first plate to ground to remove charge accumulated between the first plate and the second plate.

82. An electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector and a second reflector defining an optical cavity therebetween and selective of a visible wavelength at an intensity by optical interference; and

,

a charge-controlling mechanism to allow optical properties of the optical cavity to be varied by controlling a predetermined amount of charge stored on the first and the second reflectors, such that at least one of the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

83. electronic device of claim 82, wherein the mechanism comprises a charge-sharing capacitor.

84. electronic device of claim 83, wherein the mechanism further comprises a voltage source and a second capacitor in parallel with the first reflector and the second reflector, the mechanism switching between the voltage source and the charge-sharing capacitor, the second capacitor, the first reflector, and the second reflector.

85. electronic device of claim 82, wherein the mechanism comprises a controlled current source and circuitry for controlling a time interval that the current source is applied to the first reflector and the second reflector.

86. electronic device of claim 82, wherein the first reflector is a top, semi-reflective reflector, and the second reflector is a bottom, highly reflective reflector.

87. electronic device of claim 82, wherein the mechanism allows a thickness of the optical cavity to be varied to variably select at least one of the visible wavelength and the intensity.

88. electronic device of claim 82, wherein the mechanism comprises a flexure operatively coupled to one of the first and the second reflectors.

89. electronic device of claim 88, wherein the flexure is a non-linear flexure that has non-linear spring functionality.

90. electronic device of claim 82, wherein the optical cavity operates in accordance with a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another, such that a thickness of the optical cavity therebetween is controllable by the mechanism to select color.

91. electronic device of claim 82, wherein the optical cavity has a sufficiently great thickness to produce an order of spectral response of a color corresponding to the visible wavelength that is greater than one.

92. electronic device of claim 82, further comprising a third reflector between the first reflector and the second reflector such that the optical cavity encompasses a first gap between the first reflector and the third reflector and a second gap between the third reflector and the second reflector.

93. electronic device of claim 82, wherein the optical cavity is analog, such that both the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

94. electronic device of claim 82, wherein the optical cavity is digital and operates in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

95. electronic device of claim 82, wherein the optical cavity is digital, such that the visible wavelength of which the optical cavity is selective is fixed as a color component wavelength, and the intensity of the color component wavelength is variably selectable in correspondence with a corresponding color component of the pixel of the displayable image.

96. electronic device of claim 82, wherein the optical cavity is one of reflectively selective and transmissively selective.

97. n electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector and a second reflector defining an optical cavity therebetween and selective of a visible wavelength at an intensity by optical interference; and

,

means for controlling a predetermined amount of charge stored on the first and the second reflectors to vary optical properties of the optical cavity to variably select at least one of the visible wavelength and the intensity in correspondence with the pixel of the displayable image.

98. electronic device of claim 97, wherein a thickness of the optical cavity is variable.

99. electronic device of claim 97, further comprising a non-linear flexure having non-linear spring functionality.

100. electronic device of claim 97, wherein the optical cavity is operable in a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another.

101. electronic device of claim 97, wherein the optical cavity has a sufficiently great thickness to produce an order of spectral response of a color corresponding to the visible wavelength that is greater than one.

102. electronic device of claim 97, further comprising a third reflector between the first reflector and the second reflector such that the optical cavity encompasses a first gap between the first reflector and the third reflector and a second gap between the third reflector and the second reflector.

103. electronic device of claim 97, wherein the optical cavity is operable in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

104. display device comprising:

a plurality of electrically adjustable optical resonant cavities to correspondingly display a plurality of pixels of a displayable image by optical interference,

wherein the plurality of cavities are digital, such that the plurality of cavities are divided into a plurality of cavity groups, each cavity group variably selecting a visible wavelength at an intensity corresponding to a color and an intensity of a corresponding pixel of the displayable image.

105. display device of claim 104, wherein each cavity group comprises a sub-plurality of the plurality of cavities, each cavity of the sub-plurality of each cavity group selecting a different static color wavelength at a variably intensity corresponding to a different color component of a pixel of the displayable image to which the cavity group corresponds.

106. display device of claim 104, wherein each of at least one of the plurality of cavities operates in three different states.

107. display device of claim 104, wherein the plurality of cavities are each of one of a plurality of types, each of the plurality of types having three different operable states.

108. display device of claim 104, wherein each cavity group comprises a red wavelength-selecting cavity selecting a red intensity corresponding to a red color component of a pixel of the displayable image to which the cavity group corresponds, a green wavelength-selecting cavity selecting a red intensity corresponding to a green color component of a pixel of the displayable image to which the cavity group corresponds, and a blue wavelength-selecting cavity selecting a red intensity corresponding to a blue color component of a pixel of the displayable image to which the cavity group corresponds.

109. display device of claim 104, further comprising at least one charge-controlling mechanism to allow optical properties of the optical resonant cavities to be varied by controlling a predetermined amount of charge stored over the cavities.

110. display device of claim 104, further comprising, for each optical resonant cavity, a first reflector and a second reflector defining the optical resonant cavity therebetween, and a flexure operatively coupled to one of the first and the second reflectors.

111. display device of claim 110, wherein the flexure has a non-linear spring functionality.

112. display device of claim 110, wherein each optical resonant cavity is operable in a contact mode in which the first and the second reflectors come into contact with one another, and a non-contact mode in which the first and the second reflectors are separated from one another.

113. display device of claim 110, wherein each optical resonant cavity has a sufficiently great thickness to produce an order of spectral response greater than one.

114. display device of claim 110, further comprising, for each optical resonant cavity, a third reflector between the first and the second reflectors, such that each optical resonant cavity encompasses a first gap between the first and the third reflectors and a second gap between the third and the second reflectors.

115. method comprising:

for each pixel of a pixilated displayable image, controlling a predetermined amount of charge over one or more corresponding optical resonant cavities to select a corresponding visible wavelength at a corresponding intensity by optical interference to display the pixel.

116. method of claim 115, further comprising providing light for illumination of the corresponding visible wavelength.

117. method of claim 115, further initially comprising dividing a displayable image into the pixilated displayable image.

118. method of claim 115, wherein controlling the predetermined amount of charge over the one or more corresponding optical resonant cavities comprises, for each pixel:

for a red color wavelength, controlling the predetermined amount of charge over a first optical resonant cavity to select a red intensity corresponding to a red color component of the pixel;

for a green color wavelength, controlling the predetermined amount of charge over a second optical resonant cavity to select a green intensity corresponding to a green color component of the pixel; and

,

for a blue color wavelength, controlling the predetermined amount of charge over a third optical resonant cavity to select a blue intensity corresponding to a blue color component of the pixel.

119. n electronic device for at least partially displaying a pixel of a displayable image comprising:

a first reflector, a second reflector, and a third reflector in-between the first and the second reflectors defining an optical cavity inclusive of a first gap between the first reflector and the third reflector, and a second gap between the second reflector and the third reflector, the optical cavity selective of a visible wavelength at an intensity by optical interference; and

,

a mechanism to allow optical properties of the optical cavity, such that at least one of the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

120. electronic device of claim 119, wherein the optical cavity is analog, such that both the visible wavelength and the intensity are variably selectable in correspondence with the pixel of the displayable image.

121. electronic device of claim 119, wherein the optical cavity is digital and operates in accordance with multiple levels, each level corresponding to at least one of a different color and a different intensity of the different color.

122. electronic device of claim 119, wherein the optical cavity is digital, such that the visible wavelength of which the optical cavity is selective is fixed as a color component wavelength, and the intensity of the color component wavelength is variably selectable in correspondence with a corresponding color component of the pixel of the displayable image.

123. electronic device of claim 119, wherein the optical cavity is one of reflectively selective and transmissively selective.