Intelligent condition-monitoring and fault diagnostic system for predictive maintenance
First Claim
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1. A system for condition monitoring and fault diagnosis comprising:
- a data collection function that acquires time histories of selected variables for one or more of the components;
a pre-processing function that calculates specified characteristics of the time histories;
an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components; and
a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
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Abstract
A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
397 Citations
37 Claims
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1. A system for condition monitoring and fault diagnosis comprising:
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a data collection function that acquires time histories of selected variables for one or more of the components;
a pre-processing function that calculates specified characteristics of the time histories;
an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components; and
a reasoning function for determining the condition of the one or more components from the one or more hypotheses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of component condition monitoring and fault diagnosis comprising:
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acquiring time histories of selected variables for one or more of the components;
calculating specified characteristics of the time histories;
evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components; and
determining the condition of the one or more components from the one or more hypotheses. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A computer program product comprising a computer usable medium having computer usable program code for component condition monitoring and fault diagnosis, that when run on a computer causes the computer to:
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acquire time histories of selected variables for one or more of the components;
calculate specified characteristics of the time histories;
evaluate the characteristics to produce one or more hypotheses of a condition of the one or more components; and
determine the condition of the one or more components from the one or more hypotheses. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. A system for component condition monitoring and fault diagnosis comprising:
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a data collection function that acquires time histories of selected variables for one or more components;
a pre-processing function that calculates specified characteristics of the time histories;
an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components;
a reasoning function for determining the condition of the one or more components from the one or more hypotheses; and
a manager function that determines the selected variables acquired by the data collection function, triggers data processing in the pre-processing function for calculating the specified characteristics, initiates evaluation of the characteristics by the analysis function to yield the hypotheses, and triggers derivation of the component conditions by the reasoning function. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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31. A system for monitoring component conditions of a semiconductor production tool comprising:
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a component controller having data collection function that acquires time histories of selected variables of one or more of the components;
a mechatronic device controller having a pre-processing function that calculates specified characteristics of the time histories for those of the one or more components operating together as a mechatronic device. a group controller for a group of mechatronic devices with an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components;
a system controller having a reasoning function for determining the condition of the one or more components from the one or more hypotheses, and a manager function that determines the selected variables acquired by the data collection function, triggers data processing in the pre-processing function for calculating the specified characteristics, initiates evaluation of the characteristics by the analysis function to yield the hypotheses, and triggers derivation of the component conditions by the reasoning function. - View Dependent Claims (32, 33, 34, 35, 36, 37)
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Specification