Biosensor containing ruthenium, measurement using the same and application thereof
First Claim
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1. A preparation method for a biosensor comprising an extended gate ion-sensitive field effect transistor structure, the method comprising the steps of:
- providing an extended gate ion sensitive field effect transistor comprising an extended gate region;
forming a ruthenium-containing film on the extended gate region by radio frequency (RF) sputtering; and
packaging the extended gate region with an insulating layer with the ruthenium-containing film exposed to obtain a biosensor.
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Abstract
A biosensor containing ruthenium, measurement using the same, and the application thereof. The biosensor comprises an extended gate field effect transistor (EGFET) structure, including a metal oxide semiconductor field effect transistor (MOSFET), a sensing unit comprising a substrate, a layer comprising ruthenium on the substrate, and a metal wire connecting the MOSFET and the sensing unit.
25 Citations
41 Claims
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1. A preparation method for a biosensor comprising an extended gate ion-sensitive field effect transistor structure, the method comprising the steps of:
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providing an extended gate ion sensitive field effect transistor comprising an extended gate region;
forming a ruthenium-containing film on the extended gate region by radio frequency (RF) sputtering; and
packaging the extended gate region with an insulating layer with the ruthenium-containing film exposed to obtain a biosensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A system for measuring pH value in a solution, comprising
a biosensor with an extended gate field effect transistor structure, comprising: -
a metal oxide semiconductor field effect transistor (MOSFET);
an extended gate as a sensing unit, comprising a substrate, and a ruthenium-containing film thereon; and
a conductive wire connecting the MOSFET and the sensing unit;
a reference electrode supplying stable voltage;
a semiconductor characteristic instrument connecting the biosensor and the reference electrode respectively;
a temperature controller comprising a temperature control center, a thermocouple, and a heater, wherein the temperature control center connects the thermocouple and the heater, respectively; and
a light-isolation container isolating the sensing unit of the pH sensor from photosensitive effect;
wherein measurement of pH value of a solution comprises;
pouring a solution into the light-isolation container;
immersing the sensing unit of the biosensor, the reference electrode, and the thermocouple in the solution;
adjusting temperature of the solution by the heater controlled by the temperature control center after detection of temperature variation in the solution by the thermocouple;
transmitting measurement data from the biosensor and the reference electrode to the semiconductor characteristic instrument; and
reading out current-voltage (I-V) values of the solution by the semiconductor characteristic instrument to obtain pH value of the solution. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A vitamin C biosensor with an extended gate field effect transistor structure, comprising:
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a metal oxide semiconductor field effect transistor (MOSFET);
a first extended gate to act as a first sensing unit, comprising a first substrate, and a first ruthenium-containing film thereon;
a second extended gate to act as a second sensing unit comprising a second substrate, a second ruthenium-containing film thereon, and a ascorbate oxidase film immobilized on the second ruthenium-containing film; and
a conductive wire connecting the MOSFET and the first and the second sensing units. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification