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Observation unit

  • US 20070125962A1
  • Filed: 11/27/2006
  • Published: 06/07/2007
  • Est. Priority Date: 12/06/2005
  • Status: Active Grant
First Claim
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1. An observation unit comprising:

  • imaging means for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature;

    a housing case which houses the imaging means and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging means; and

    cooling medium supplying means for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.

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