Observation unit
First Claim
1. An observation unit comprising:
- imaging means for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature;
a housing case which houses the imaging means and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging means; and
cooling medium supplying means for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.
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Accused Products
Abstract
It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.
13 Citations
4 Claims
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1. An observation unit comprising:
- imaging means for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature;
a housing case which houses the imaging means and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging means; and
cooling medium supplying means for supplying a cooling medium to the inside of the housing case, whereinthe translucent member is a silica glass plate having a gold film on both sides or one side. - View Dependent Claims (2, 3, 4)
- imaging means for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature;
Specification