Dual membrane sensor for temperature compensated pressure sensing
First Claim
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1. A pressure sensor comprising:
- a sensor membrane formed from conductive material for exposure to fluid at a pressure to be sensed;
a compensation membrane formed from conductive material and sealed from the fluid at the pressure to be sensed; and
, associated circuitry connected to the sensor membrane for converting deflection into an output signal indicative of the fluid pressure and connected to the compensation membrane for converting deflection into an adjustment to the output signal that compensates for membrane deflection due to thermal expansion.
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Abstract
A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry connected to the sensor membrane converts deflection into an output signal indicative of the fluid pressure. The circuitry also connects to the compensation membrane to convert deflection into an adjustment to the output signal that compensates for membrane deflection due to thermal expansion.
27 Citations
20 Claims
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1. A pressure sensor comprising:
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a sensor membrane formed from conductive material for exposure to fluid at a pressure to be sensed;
a compensation membrane formed from conductive material and sealed from the fluid at the pressure to be sensed; and
,associated circuitry connected to the sensor membrane for converting deflection into an output signal indicative of the fluid pressure and connected to the compensation membrane for converting deflection into an adjustment to the output signal that compensates for membrane deflection due to thermal expansion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification