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Method of fabricating a pressure sensor

  • US 20070157465A1
  • Filed: 02/16/2007
  • Published: 07/12/2007
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A method of fabricating a pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a wafer substrate with a recess;

    a flexible membrane covering the recess to define a chamber containing a fluid at a reference pressure, such that the flexible membrane deflects due to pressure differentials between the reference pressure and the fluid pressure;

    associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure; and

    , an apertured guard formed over the membrane;

    the method comprising the steps of;

    depositing sacrificial material over the flexible membrane;

    depositing guard material over the sacrificial material and some of the wafer substrate;

    lithographically etching an array of apertures in the guard material; and

    , plasma cleaning the sacrificial material away through the array of apertures in the guard material.

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