Ion sources, systems and methods
First Claim
Patent Images
1. A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of 10 nm or less at a surface of a sample.
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Accused Products
Abstract
Ion sources, systems and methods are disclosed.
162 Citations
83 Claims
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1. A system, comprising:
a gas field ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of 10 nm or less at a surface of a sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A system, comprising:
an ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of three nm or less at a surface of a sample.
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27-50. -50. (canceled)
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51. An ion microscope capable of producing an image of a sample, the sample being different from the ion microscope, the image of the sample having a resolution of three nm or less.
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52-81. -81. (canceled)
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82. A gas field ion microscope capable of producing an image of a sample, the sample being different from the ion microscope, the image of the sample having a resolution of 10 nm or less.
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83-112. -112. (canceled)
Specification