Electrostatic chuck and method of its manufacture
First Claim
1. A chuck body structure for use in an electrostatic chuck structure for holding an article, the chuck body structure comprising an electrically insulating substrate layer having a first flat surface for holding the article thereon and a second opposite surface having a pattern in the form of an array of spaced-apart grooves for carrying an electrically conductive layer thereon electrode arrangement containing layer on inner surface of at least some of the spaced-apart grooves and the spaces between the grooves.
1 Assignment
0 Petitions
Accused Products
Abstract
An electrostatic chuck structure for holding an article is presented. The chuck structure comprises an electrically insulating chuck body layer having a first flat surface for holding the article thereon, and a second opposite surface having a honeycombed pattern in the form of an array of spaced-apart grooves. This second patterned surface of th4e chuck body surface for depositing thereon an electrically conductive layer (electrodes). A dielectric spacer between the electrodes and the article on the chuck body layer is defined by a portion of the chuck body layer between the grooves'"'"' bottom and the flat surface.
7 Citations
15 Claims
- 1. A chuck body structure for use in an electrostatic chuck structure for holding an article, the chuck body structure comprising an electrically insulating substrate layer having a first flat surface for holding the article thereon and a second opposite surface having a pattern in the form of an array of spaced-apart grooves for carrying an electrically conductive layer thereon electrode arrangement containing layer on inner surface of at least some of the spaced-apart grooves and the spaces between the grooves.
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11. An electrostatic chuck structure for holding an article, the chuck structure comprising:
- an electrically insulating substrate layer having a first flat surface for holding the article thereon and a second opposite surface having a pattern in the form of an array of spaced-apart grooves; and
an electrode arrangement containing layer on inner surface of at least some of the spaced-apart grooves and the spaces between the grooves so as to define at least two spaced-apart continuous electrically conductive layer regions for at least two electrodes, respectively.
- an electrically insulating substrate layer having a first flat surface for holding the article thereon and a second opposite surface having a pattern in the form of an array of spaced-apart grooves; and
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12. A method of manufacturing an electrostatic chuck structure for holding an article, the method comprising producing a chuck body in the form of an electrically insulating substrate layer having a first flat surface for holding the article thereon and a second opposite surface having a pattern in the form of an array of spaced-apart grooves;
- thereby enabling deposition of an electrically conductive layer onto the second surface to define at least two spaced-apart electrodes, a portion of the electrically insulating substrate layer between the bottom of the grooves and said flat surface defining a dielectric spacer between the electrodes and the article held by the flat surface of the electrically insulating substrate layer.
- View Dependent Claims (13, 14, 15)
Specification