Method of Producing Silicon Nanoparticles from Stain-Etched Silicon Powder
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Abstract
The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nonparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
23 Citations
28 Claims
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1-9. -9. (canceled)
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10. A method for making porous silicon powder comprising the steps of:
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a) providing a quantity of silicon powder comprising a plurality of silicon particles; and
b) etching said silicon particles using a stain-etch process. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28-36. -36. (canceled)
Specification