PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
First Claim
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1. A piezoelectric material expressed by a general formula (1) as follows:

(Bi_{1−x}Ba_{x})(Fe_{1−x}Ti_{x})O_{3 }
(1),where x is greater than 0, but smaller than 1(0<
x<
1).
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Abstract
A piezoelectric material is expressed by a general formula (1) as follows: (Bi_{1−x}Ba_{x})(Fe_{1−x}Ti_{x})O_{3 }. . . (1), where x is greater than 0, but smaller than 1(0<x<1).
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11 Claims

1. A piezoelectric material expressed by a general formula (1) as follows:

(Bi_{1−x}Ba_{x})(Fe_{1−x}Ti_{x})O_{3 }
(1),where x is greater than 0, but smaller than 1(0<
x<
1).  View Dependent Claims (2, 3, 4)


5. A piezoelectric device comprising:

a base substrate; a lower electrode formed above the base substrate; a piezoelectric layer formed above the lower electrode; and an upper electrode formed above the piezoelectric layer, wherein the piezoelectric layer is composed of a piezoelectric material that is expressed by a general formula (1) as follows;
(Bi_{1−x}Ba_{x})(Fe_{1−x}Ti_{x})O_{3 }
(1),where x is greater than 0, but smaller than 1(0<
x<
1).  View Dependent Claims (7, 8, 9, 10, 11)


6. A piezoelectric device comprising:

a base substrate; a piezoelectric layer formed above the base substrate; a first electrode formed above the piezoelectric layer; and a second electrode formed above the piezoelectric layer and spaced from the first electrode, wherein the piezoelectric layer is composed of a piezoelectric material that is expressed by a general formula (1) as follows;
(Bi_{1−x}Ba_{x})(Fe_{1−x}Ti_{x})O_{3 }
(1),where x is greater than 0, but smaller than 1(0<
x<
1).

1 Specification