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PACKAGING A MEMS DEVICE USING A FRAME

  • US 20070242345A1
  • Filed: 04/13/2007
  • Published: 10/18/2007
  • Est. Priority Date: 04/13/2006
  • Status: Active Grant
First Claim
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1. A method of manufacturing a microelectromechanical systems (MEMS) based display device, the method comprising:

  • providing a transparent substrate comprising at least one MEMS device formed thereon;

    providing a backplate;

    providing a plurality of seal pieces configured to circumscribe the MEMS device; and

    forming a MEMS package wherein the transparent substrate is joined to the plurality of seal pieces, and the seal pieces are joined to the backplate.

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