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Three-Dimensional Shape Measuring Unit, Processing Unit, and Semiconductor Device Manufacturing Method

  • US 20070253001A1
  • Filed: 06/24/2004
  • Published: 11/01/2007
  • Est. Priority Date: 06/25/2003
  • Status: Active Grant
First Claim
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1. A three-dimensional shape measuring apparatus comprising:

  • a plurality of measurement heads for measuring a three-dimensional shape of a sample, wherein three-dimensional shapes at a plurality of points on the sample are simultaneously measured using the plurality of measurement heads.

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