Micro-mirror hinge

• US 20070258125A1
• Filed: 05/08/2006
• Published: 11/08/2007
• Est. Priority Date: 05/08/2006
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Knipe, Richard
• Granted Patent: US 8,432,597 B2
• Time in Patent Office: Days
• US Class Current: 359/245
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

According to one embodiment of the present invention a digital micro-mirror device is taught that includes a pixel occupying an area of the device and a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.

Claims

1. A digital micro-mirror device comprising:

a pixel occupying an area of the device; and

a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.

2. The device of claim 1 wherein the hinge is supported by a first via that is located outside the area of the pixel and a second via that is located outside the area.

3. The device of claim 1 wherein the hinge comprises a mounting that is connected to the center of the pixel.

4. The device of claim 1 wherein the hinge comprises a material selected from the group consisting of aluminum, titanium, tungsten, aluminum alloys, and combinations thereof.

5. A micro-mirror element comprising:

a hinge traversing at least a portion of an adjacent micro-mirror element.

6. The micro-mirror element of claim 5 wherein the hinge is supported by a first via that is located at an adjacent micro-mirror element and a second via that is located at an adjacent micro-mirror element.

7. The micro-mirror element of claim 5 wherein the hinge comprises a mounting that is connected to the center of the micro-mirror element.

8. The micro-mirror element of claim 5 wherein the hinge comprises a material selected from the group consisting of aluminum, titanium, tungsten, aluminum alloys, and combinations thereof.

9. An array of micro-mirrors comprising:

a first micro-mirror that is adjacent to both a second micro-mirror and a third micro-mirror; and

wherein the first micro-mirror comprises a first hinge;

wherein the first hinge is supported by a first via and a second via, the first via being located beneath the second micro-mirror and the second via being located beneath the third micro-mirror; and

wherein the first hinge comprises a first mounting, said first mounting being connected to the center of said first micro-mirror.

10. The array of claim 9 wherein:

the second micro-mirror comprises a second hinge, the second hinge being supported by a third via and a fourth via, the third via being located beneath the first micro-mirror and the fourth via being located beneath a fourth micro-mirror adjacent to the second micro-mirror; and

the second hinge comprises a second mounting, said second mounting being connected to the center of said second micro-mirror.

11. The array of claim 10 wherein:

the third micro-mirror comprises a third hinge supported by a fifth via and a sixth via, the fifth via being located beneath the first micromirror and the sixth via bein located beneath a fifth micro-mirror adjacent to the third micro-mirror; and

the third hinge comprises a third mounting, said third mounting being connected to the center of said third micro-mirror.

12. A method of reflecting light by:

selectively positioning light by tilting a plurality of micro-mirrors by twisting a plurality of hinges traversing at least a portion of multiple micro-mirrors.

13. The method of claim 12 wherein the plurality of hinges traversing multiple micro-mirrors comprises a hinge supported by first and second vias located beneath respective mirrors adjacent the micro-mirror.

14. The method of claim 12 wherein selectively positioning light by tilting a plurality of micro-mirrors by twisting hinges comprises selectively positioning light by tilting a plurality of micro-mirrors by twisting hinges that have a plurality of vias connected therewith.

15. The method of claim 12 wherein each hinge comprises a mounting that is connected to the center of a respective micro-mirror element.

16. The method of claim 12 wherein the hinge comprises a material selected from the group consisting of aluminum, titanium, tungsten, aluminum alloys, and combinations thereof.