System and method for removal of photoresist and stop layer following contact dielectric etch

• US 20070269975A1
• Filed: 05/18/2006
• Published: 11/22/2007
• Est. Priority Date: 05/18/2006
• Status: Abandoned Application

• Current Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area)
• Original Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area)
• Inventors: Hou, Li, Savas, Stephen E., Xu, Songlin
• Application Number:
  US11/436,950
• Publication Number:
  US 20070269975A1
• Time in Patent Office: Days
• US Class Current: 438/637
• CPC Class Codes: H01L 21/02063 the processing being the formation of vias or contact holes
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/76814 post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
• CPC Class Codes: H01L 21/76829 characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers

Abstract

In device fabrication, a photoresist layer is formed on an insulation layer, above a stop layer that is supported directly on an active device structure. Holes are needed through the insulation layer to reach a contact arrangement, defined by the active device structure in which each contact is covered by the stop layer and some of the contacts include a silicide material. A plurality of contact openings are etched through the insulation layer to expose the stop layer above each contact, which may produce etch related residue. The photoresist and residues are then stripped using a first plasma that contains oxygen, without removing the stop layer such that the stop layer protects the silicide material from the oxygen. Thereafter, etching is performed to remove the stop layer from the contacts using a second plasma that is oxygen free and which contains hydrogen.

Claims

1. In an overall technique for fabricating an integrated circuit on a wafer having an active device structure, during which fabrication, a patterned layer of photoresist is formed on an overall insulation layer that is itself supported directly on a stop layer that is, in turn, supported directly on the active device structure for using the patterned layer of photoresist in etching holes through the insulation layer to reach an electrical contact that is defined by the active device structure where each electrical contact of a plurality of the electrical contacts is covered by said stop layer and at least some of said electrical contacts include a silicide material and where a plurality of said holes are etched through said overall insulation layer such that one hole is associated with each electrical contact to at least partially expose the stop layer above each electrical contact and where etching of said holes, at least potentially, produces etch related residues, a method comprising:

stripping said patterned layer of photoresist and said related residues by etching using a first plasma that contains oxygen without substantially removing said stop layer such that the stop layer serves to protect the silicide material from the oxygen; and

after said stripping, etching to remove said stop layer from said contacts using a second plasma that is oxygen free, at least to an approximation, and which second plasma contains hydrogen gas.

2. The method of claim 1 wherein said etching to remove the stop layer with said second plasma uses a fluorine containing gas that is added in an amount that is substantially less than said hydrogen gas.

3. The method of claim 2 wherein said etching using the second plasma, at least to an approximation, exposes said stop layer to radicals and ions formed from said hydrogen gas and said fluorine containing gas.

4. The method of claim 3 wherein said second plasma includes a fluorocarbon gas at less than approximately 15% of an amount of said hydrogen gas.

5. The method of claim 1 wherein etching to remove said stop layer includes at least initially exposing said stop layer to said second plasma generated using said hydrogen gas and a fluorine containing gas and, thereafter, at least concluding removal of said stop layer by generating said second plasma using a substantially pure hydrogen gas.

6. The method of claim 5 wherein said fluorine containing gas is a fluorocarbon gas in an amount that is less than approximately 15% of the hydrogen gas.

7. The method of claim 5 wherein said fluorine containing gas is CF₄ in a range of approximately 7%-14% of the hydrogen gas.

8. The method of claim 1 including performing said stripping at a temperature of no more than approximately 130 degrees C.

9. The method of claim 1 wherein said stripping forms said second plasma predominantly from oxygen gas.

10. The method of claim 9 including adding CF₄ to the first plasma prior to concluding said stripping for use in residue removal.

11. The method of claim 10 wherein said stripping is performed during a strip process time interval and said CF₄ is added for approximately 20% of a concluding portion of the strip process time interval.

12. The method of claim 11 wherein said CF₄ is added at a flow rate of no more than approximately 5% of a total gas flow.