Capacitive Pressure Sensor with Sealed Reference Chamber
First Claim
1. A capacitive pressure sensor comprising:
- a substrate assembly having a conductive layer and defining a plurality of channels terminating in closed ends;
a conductive membrane mounted to the substrate assembly so that sealed reference chambers are defined by respective channels, the conductive membrane and the substrate assembly; and
a cap arranged on the substrate assembly and defining one or more apertures so that an antechamber is defined between the cap and the conductive membrane, such that differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer.
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Accused Products
Abstract
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber including the channels is defined by the conductive membrane and the substrate assembly. A cap is mounted relative to the substrate assembly and defines one or more apertures so that an antechamber is defined by the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and conductive layer.
38 Citations
7 Claims
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1. A capacitive pressure sensor comprising:
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a substrate assembly having a conductive layer and defining a plurality of channels terminating in closed ends;
a conductive membrane mounted to the substrate assembly so that sealed reference chambers are defined by respective channels, the conductive membrane and the substrate assembly; and
a cap arranged on the substrate assembly and defining one or more apertures so that an antechamber is defined between the cap and the conductive membrane, such that differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer. - View Dependent Claims (2, 3, 4)
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5. A capacitive pressure sensor comprising:
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a substrate assembly having a conductive layer and defining a plurality of channels terminating in closed ends;
a conductive membrane mounted to the substrate assembly so that sealed reference chambers are defined by respective channels, the conductive membrane and the substrate assembly, such that differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer;
a cap arranged on the substrate assembly and defining one or more apertures so that an antechamber is defined between the cap and the conductive membrane; and
a cover configured to be engaged with the cap to define a main chamber in fluid communication with the antechamber. - View Dependent Claims (6, 7)
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Specification