Determination of interferometric modulator mirror curvature and airgap variation using digital photographs

• US 20080002210A1
• Filed: 06/30/2006
• Published: 01/03/2008
• Est. Priority Date: 06/30/2006
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Djordjev, Kostadin
• Granted Patent: US 7,388,704 B2
• Time in Patent Office: Days
• US Class Current: 356/496
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 27/0012 Optical design, e.g. procedures, algorithms, optimisation routines
• CPC Class Codes: G02F 1/21 by interference

Abstract

Air gap variation in an interferometric modulator over a two-dimensional spatial map of the modulator is determined by acquiring a digital photograph of the modulator. Color parameters of individual pixels in the photograph are determined and compared to a model of color parameters as a function of air gap distance. The model and individual pixel color parameters may be plotted on a color space plot for comparison. The determined distances may be plotted over a two-dimensional spatial map of the interferometric modulator to visualize the mirror curvature and air gap variation.

Claims

1. A method, comprising:

deriving a model that comprises color parameters as a function of distance between two mirrors in a Fabry-Perot interferometer;

determining color parameters for light reflected from the Fabry-Perot interferometer at a particular location; and

comparing the determined color parameters with the model to estimate the distance between the two mirrors in the Fabry-Perot interferometer at the particular location.

2. The method of claim 1, wherein the color parameters in the model and the determined color parameters are u′

and v′

color parameters.

3. The method of claim 1, wherein deriving the model comprises plotting color parameters for a plurality of distances between the two mirrors in the Fabry-Perot interferometer in a two-dimensional color space.

4. The method of claim 1, wherein the model is based on one or more properties of one or more materials in the Fabry-Perot interferometer, the properties selected from the group consisting of index of refraction, extinction coefficient, and thickness.

5. The method of claim 1, wherein determining color parameters comprises imaging the Fabry-Perot interferometer.

6. The method of claim 5, wherein the imaging comprises acquiring a digital photograph of the Fabry-Perot interferometer.

7. The method of claim 6, wherein the particular location is imaged in one or more pixels of the digital photograph.

8. The method of claim 7, wherein determining color parameters comprises determining the color of the one or more pixels.

9. The method of claim 1, wherein comparing the determined color parameters with the model comprises determining which color parameters in the model are closest to the determined color parameters as measured in a two-dimensional color space.

10. The method of claim 1, wherein the Fabry-Perot interferometer is an interferometric modulator.

11. The method of claim 10, wherein the interferometric modulator is in a reflective display.

12. The method of claim 1, further comprising repeating the determining and comparing steps for a plurality of particular locations in the Fabry-Perot interferometer.

13. The method of claim 12, further comprising constructing a two-dimensional map of distances between the two mirrors as a function of location in the Fabry-Perot interferometer.

14. The method of claim 12, further comprising determining the minimum distance between the two mirrors in the Fabry-Perot interferometer.

15. The method of claim 12, further comprising determining the maximum distance between the two mirrors in the Fabry-Perot interferometer.

16. The method of claim 12, further comprising determining the median distance between the two mirrors in the Fabry-Perot interferometer.

17. A method, comprising:

determining color parameters for light reflected from a Fabry-Perot interferometer; and

determining, based upon the determined color parameters, a distance between two mirrors in the Fabry-Perot interferometer.

18. The method of claim 17, wherein determining the distance between the two mirrors comprises comparing the determined color parameters with a model that comprises color parameters as a function of distance between the two mirrors.

19. The method of claim 17, wherein the Fabry-Perot interferometer is an interferometric modulator.

20. The method of claim 17, comprising determining distances between the two mirrors across substantially the entire surface area of the Fabry-Perot interferometer.

21. A test station for constructing a two-dimensional map of distances between two mirrors in an interferometric modulator, the station comprising:

a digital photograph acquisition system configured to acquire a digital photograph of the interferometric modulator; and

a computer configured to determine color parameters for a plurality of regions in the digital photograph and compare the color parameters to a model in order to determine distances between the two mirrors for a plurality of locations in the interferometric modulator.

22. The test station of claim 21, wherein the digital photograph acquisition system is configured to illuminate the interferometric modulator.

23. The test station of claim 21, wherein each one of the plurality of regions in the digital photograph correspond to one of the plurality of locations in the interferometric modulator.

24. The test station of claim 21, wherein the model comprises color parameters as a function of distance between the two mirrors.

25. The test station of claim 21, wherein the computer is further configured to generate the model based on one or more properties of one or more materials in the interferometric modulator, the properties selected from the group consisting of index of refraction, extinction coefficient, and thickness.

26. The test station of claim 21, wherein the digital photograph acquisition system comprises an in-line illumination source and a digital camera.

27. The test station of claim 21, wherein the computer is configured to produce as output a two-dimensional map of distances between the two mirrors as a function of location in the interferometric modulator.

28. The test station of claim 27, wherein the computer is configured to produce the two-dimensional map in the form of a contour plot.

29. The test station of claim 27, wherein the computer is configured to produce the two-dimensional map in the form of a surface plot.

30. The test station of claim 21, wherein each of the plurality of regions comprise one pixel of the digital photograph.

31. A test station for constructing a two-dimensional map of distances between two mirrors in an interferometric modulator, the station comprising:

means for acquiring a digital photograph of the interferometric modulator; and

means for determining color parameters for a plurality of regions in the digital photograph and comparing the color parameters to a model in order to determine distances between the two mirrors for a plurality of locations in the interferometric modulator.

32. The test station of claim 31, wherein the acquiring means is a digital camera.

33. The test station of claim 31, wherein the determining and comparing means is a computer.