Microprobe array structure and method for manufacturing the same
First Claim
1. A microprobe structure used to measure biopotential signals, said microprobe structure comprising:
- a tip portion;
a needle with a top connected to said tip portion, the cross-sectional area of said top being larger than that of a bottom of said needle; and
a conducting layer covering on said tip portion and said needle.
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Abstract
A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.
63 Citations
50 Claims
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1. A microprobe structure used to measure biopotential signals, said microprobe structure comprising:
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a tip portion; a needle with a top connected to said tip portion, the cross-sectional area of said top being larger than that of a bottom of said needle; and a conducting layer covering on said tip portion and said needle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A microprobe array structure used to measure biopotential signals, said microprobe array structure comprising:
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a substrate; and a plurality of microprobes each having a tip portion, a needle and a conducting layer, a top of said needle being connected to said tip portion and a bottom of said needle being connected to said substrate, the cross-sectional area of said top being larger than that of said bottom, said conducting layer covering on said tip portion and said needle. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for manufacturing microprobes, said method comprising the steps of:
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providing a substrate and forming a patterned masking layer thereon; isotropically etching a plurality of tip portions with said masking layer as the mask; anisotropically etching downwards a plurality of needles and controlling etching parameters to let the cross-sectional area of the connection between said needle and said tip portion be larger than that of the other end of said needle; removing said masking layer to get said microprobe structure; and forming a conducting layer on said microprobe structure. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A method for manufacturing microprobes, said method comprising the steps of:
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forming a mold with a imprint or negative image of the desired surface features which may include microprobes and substrates; filling the mold to produce the microprobes; and forming a conducting layer on said microprobe. - View Dependent Claims (50)
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Specification