Thermal Analysis Equipment

• US 20080025367A1
• Filed: 08/26/2005
• Published: 01/31/2008
• Est. Priority Date: 09/03/2004
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Original Assignee: SII NanoTechnology Inc. (Hitachi, Ltd.)
• Inventors: Nakatani, Rintaro
• Granted Patent: US 7,748,894 B2
• Time in Patent Office: Days
• US Class Current: 374/45
• CPC Class Codes: G01N 25/72 Investigating presence of flaws

Abstract

Electromagnetic-wave data acquisition control means 6 determines whether a trigger condition set by electromagnetic-wave data acquisition trigger setting means 7 is met, and when the trigger condition is met, data of electromagnetic waves are acquired. Electromagnetic-wave data relating means 10 relates a position on data of thermal analysis when a trigger is generated, and data of electromagnetic waves to each other and using the results, electromagnetic-wave data specifying means 14 specifies data of electromagnetic waves corresponding to an indicated position on data of thermal analysis to output the data of electromagnetic waves to the vicinity of the data of thermal analysis.

Claims

1. A thermal analysis equipment comprising

a heating furnace that heats a sample,

a temperature controller that controls a temperature of the heating furnace,

a temperature sensor that detects a temperature of the sample,

thermal analysis data preservation means that preserves, as data of thermal analysis, signals from the temperature sensor and the physical quantity sensor,

electromagnetic-wave data acquisition means that acquires data of electromagnetic waves, which are obtained by detecting electromagnetic waves from the sample to digitize the same,

electromagnetic-wave data acquisition trigger setting means that sets a trigger for acquisition of the data of electromagnetic waves,

electromagnetic-wave data acquisition control means that controls acquisition of the data of electromagnetic waves according to setting in the electromagnetic-wave data acquisition trigger setting means, and

electromagnetic-wave data preservation means that preserves the data of electromagnetic waves.

2. The thermal analysis equipment according to claim 1, wherein the data of electromagnetic waves acquired by the electromagnetic-wave data acquisition means comprise a sample picture of a visible light, or a sample picture of light, such infrared light, etc., except a visible light.

3. The thermal analysis equipment according to claim 1, wherein the data of electromagnetic waves acquired by the electromagnetic-wave data acquisition means comprise a spectrum.

4-8. -8. (canceled)