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Insert Molded Actuator Components

  • US 20080029207A1
  • Filed: 07/20/2006
  • Published: 02/07/2008
  • Est. Priority Date: 07/20/2006
  • Status: Active Grant
First Claim
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1. A method of making an electrostatically actuated device component comprising:

  • providing a multilayered structure comprisinga first layer comprising a first polymer;

    a second layer comprising a conductive material, the second layer disposed over the first layer;

    a third layer comprising a dielectric material, the third layer disposed over the second layer, the third layer having a surface roughness (Rq) of less than about 1000 angstroms;

    positioning the multilayered structure within an injection mold; and

    injecting a second polymer into the mold and bonding the first layer to the second polymer to produce an electrostatically actuated device component.

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