CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY
First Claim
Patent Images
1. A light modulator comprising:
- a substrate;
a first electrode layer over the substrate;
a second electrode layer over the substrate;
a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the reflective surface movable along a direction substantially perpendicular to the reflective surface, the reflective surface movable between a first position and a second position, the first position being a first distance from the first electrode layer, the second position being a second distance from the first electrode layer; and
a conductive bus layer, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer, wherein the reflective surface moves between the first position and the second position in response to a voltage applied to the conductive bus layer.
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Abstract
Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.
161 Citations
20 Claims
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1. A light modulator comprising:
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a substrate;
a first electrode layer over the substrate;
a second electrode layer over the substrate;
a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the reflective surface movable along a direction substantially perpendicular to the reflective surface, the reflective surface movable between a first position and a second position, the first position being a first distance from the first electrode layer, the second position being a second distance from the first electrode layer; and
a conductive bus layer, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer, wherein the reflective surface moves between the first position and the second position in response to a voltage applied to the conductive bus layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for controlling a light modulator comprising:
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providing a substrate;
providing a first electrode layer over the substrate;
providing a second electrode layer over the substrate;
providing a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the reflective surface movable along a direction substantially perpendicular to the reflective surface, the reflective surface movable between a first position and a second position, the first position being a first distance from the first electrode layer, the second position being a second distance from the first electrode layer;
applying a voltage to a conductive bus layer, wherein at least a portion of the conductive bus layer is electrically coupled to at least one of the first electrode layer and the second electrode layer; and
moving the reflective surface between the first position and the second position in response to the applied voltage. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification