DYNAMIC COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR

• US 20080082579A1
• Filed: 09/29/2006
• Published: 04/03/2008
• Est. Priority Date: 09/29/2006
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Chung-Ho, Seto, Jackie, Jea, Hae-Pyng, Hsu, Tung
• Granted Patent: US 7,814,046 B2
• Time in Patent Office: Days
• US Class Current: 707/104.1
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning
• CPC Class Codes: Y10S 707/99943 Generating database or data structure, e.g. via user interface
• CPC Class Codes: Y10S 707/99945 Object-oriented database structure processing

Abstract

A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.

Claims

1. A computer-implemented method for facilitating plasma processing tool component management across a plurality of tools, comprising:

receiving first component data for a first plurality of components, including component identification and usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools;

receiving second component data for a second plurality of components, including component identification and usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool;

synchronizing said first component data and said second component data with a third database, said synchronizing including synchronizing between said third database and at least one of said first database and said second database a set of rules that govern usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools;

obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools.

2. The computer-implemented method of claim 1 wherein said obtaining information including obtaining a recommendation regarding said maintenance on said given component.

3. The computer-implemented method of claim 1 wherein said set of rules specifies a first usage rule for a first application executed by said one of said plurality of tools, said set of rules specifies a second usage rule for a second application executed by said one of said plurality of tools, said first application being one of etching, deposition, and cleaning, said second application being another of said etching, said deposition, and said cleaning.

4. The computer-implemented method of claim 1 further comprising performing pattern recognition on usage data in said third database that pertains to components analogous to said given component.

5. The computer-implemented method of claim 1 wherein said synchronization occurs automatically when said first tool is online.

6. The computer-implemented method of claim 1 wherein said set of rules specifies a first maintenance rule for a first user having a first skill level, said set of rules specifies a second maintenance rule for a second user having a second skill level.

7. The computer-implemented method of claim 1 further comprising performing maintenance forecast on components in said plurality of tools using said set of rules and data in said third database.

8. The computer-implemented method of claim 1 further comprising performing maintenance scheduling on components in said plurality of tools using said set of rules and data in said third database.

9. The computer-implemented method of claim 1 further comprising performing replacement scheduling on components in said plurality of tools using said set of rules and data in said third database.

10. An article of manufacture having thereon computer readable code for facilitating plasma processing tool component management across a plurality of tools using a cross-tool database, comprising:

computer readable code for receiving first component data for a first plurality of components, including component identification and usage history for said first plurality of components, from a first database associated with a first tool of said plurality of tools;

computer readable code for receiving second component data for a second plurality of components, including component identification and usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool;

computer readable code by synchronizing said first component data and said second component data with said cross-tool database, said synchronizing including synchronizing between said cross-tool database and at least one of said first database and said second database a set of rules that govern usage of at least one component of said first plurality of components and said second plurality of components, said cross-tool database being coupled to exchange data with software agents implemented at said plurality of tools.

computer readable code for providing information, using said set of rules and usage history data at least in said cross-tool database, to one of said software agents about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools.

11. The article of manufacture of claim 10 wherein said obtaining information including obtaining a recommendation regarding said maintenance on said given component.

12. The article of manufacture of claim 10 wherein said set of rules specifies a first usage rule for a first application executed by said one of said plurality of tools, said set of rules specifies a second usage rule for a second application executed by said one of said plurality of tools, said first application being one of etching, deposition, and cleaning, said second application being another of said etching, said deposition, and said cleaning.

13. The article of manufacture of claim 10 further comprising computer readable code for performing pattern recognition on usage data in said cross-tool database that pertains to components analogous to said given component.

14. The article of manufacture of claim 10 wherein said synchronization occurs automatically when said first tool is online.

15. The article of manufacture of claim 10 wherein said set of rules specifies a first maintenance rule for a first user having a first skill level, said set of rules specifies a second maintenance rule for a second user having a second skill level.

16. The article of manufacture of claim 10 further comprising computer readable code for performing maintenance forecast on components in said plurality of tools using said set of rules and data in said cross-tool database.

17. The article of manufacture of claim 10 further comprising computer readable code for performing maintenance scheduling on components in said plurality of tools using said set of rules and data in said cross-tool database.

18. The article of manufacture of claim 10 further comprising readable code for performing replacement scheduling on components in said plurality of tools using said set of rules and data in said cross-tool database.