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PROCESS FOR MODIFYING OFFSET VOLTAGE CHARACTERISTICS OF AN INTERFEROMETRIC MODULATOR

  • US 20080093688A1
  • Filed: 12/20/2007
  • Published: 04/24/2008
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A process development method, comprising:

  • identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and

    modifying the processing parameter to shift the non-zero offset voltage closer to zero.

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