Spatial Light Modulator
First Claim
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1. A spatial light modulator comprises:
- a partially transmissive absorbing layer through which incident light comes into the modulator, anda deformable reflective layer held below the partially transparent absorbing layer with an precisely defined empty gap in between, andan electrode layer held below the deformable reflective layer with a second precisely defined empty gap in between
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Abstract
An interferometric spatial light modulator comprises of two cavities. One is the optical resonant cavity having a partially reflective film and a movable reflective membrane as two walls, and the other is the electromechanical actuation cavity having the movable reflective membrane and a bottom metal layer as electrodes. The spatial light modulator is built on silicon substrate and is actively addressed. A microdisplay apparatus of such spatial light modulators and a projection display system using such microdisplay are also disclosed.
147 Citations
19 Claims
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1. A spatial light modulator comprises:
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a partially transmissive absorbing layer through which incident light comes into the modulator, and a deformable reflective layer held below the partially transparent absorbing layer with an precisely defined empty gap in between, and an electrode layer held below the deformable reflective layer with a second precisely defined empty gap in between - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification