Micromechanical inertial sensor having reduced sensitivity to the influence of drifting surface charges, and method suited for operation thereof

  • US 20080134785A1
  • Filed: 11/20/2007
  • Published: 06/12/2008
  • Est. Priority Date: 12/08/2006
  • Status: Active Grant
First Claim
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1. A micromechanical inertial sensor, comprising:

  • at least one seismic mass which may be deflected relative to a substrate;

    at least one electrode surface which in terms of circuitry, together with at least portions of the seismic mass, forms at least one capacitor having a capacitance which is dependent on a deflection of the seismic mass; and

    at least one additional auxiliary electrode located outside a region which forms the capacitor and which may be set at a potential that deviates from a potential of the seismic mass.

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