×

SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE

  • US 20080151347A1
  • Filed: 02/20/2008
  • Published: 06/26/2008
  • Est. Priority Date: 02/03/2004
  • Status: Active Grant
First Claim
Patent Images

1. A spatial light modulator comprising:

  • a substrate;

    a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate;

    a first optical compensation structure under the substrate; and

    a second optical compensation structure different than the first optical compensation structure, the second optical compensation structure arranged between the substrate and the light-modulating elements.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×