Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process

• US 20080204690A1
• Filed: 11/08/2007
• Published: 08/28/2008
• Est. Priority Date: 11/08/2006
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Masktools B.V. (ASML Holding NV)
• Inventors: Coskun, Tamer, Park, Sangbong, Chen, Jang Fung, Berger, Gabriel
• Granted Patent: US 8,120,753 B2
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70216 Mask projection systems
• CPC Class Codes: G03F 7/705 Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
• CPC Class Codes: G03F 7/70675 Latent image, i.e. measuring the image of the exposed resist prior to development

Abstract

A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.

Claims

1. A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil;

said method comprising the steps of;

defining said optical imaging system and a process to be utilized by said optical imaging system; and

defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel;

wherein said calibrated pupil kernel represents a linear model of the pupil performance.

2. The method of generating a model for simulating the imaging performance of an optical imaging system having a pupil according to claim 1, wherein said calibrated pupil kernel is represented in said model equation utilizing a parametric representation.

3. The method of generating a model for simulating the imaging performance of an optical imaging system having a pupil according to claim 1, wherein said calibrated pupil kernel is represented in said model equation utilizing a pixel based representation.

4. A method of simulating the imaging performance of an optical imaging system having a pupil;

said method comprising the steps of;

defining said optical imaging system and a process to be utilized by said optical imaging system;

defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel;

processing a target pattern utilizing said model equation so as to generate a simulated imaging result;

wherein said calibrated pupil kernel represents a linear model of the pupil performance.

5. The method of simulating the imaging performance of an optical imaging system having a pupil according to claim 4, wherein said calibrated pupil kernel is represented in said model equation utilizing a parametric representation.

6. The method of simulating the imaging performance of an optical imaging system having a pupil according to claim 4, wherein said calibrated pupil kernel is represented in said model equation utilizing a pixel based representation.

7. A computer readable medium bearing a computer program for generating a model for simulating the imaging performance of an optical imaging system having a pupil, the computer program, when executed, causing a computer to perform the steps of:

defining said optical imaging system and a process to be utilized by said optical imaging system; and

defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel;

wherein said calibrated pupil kernel represents a linear model of the pupil performance.

8. The computer readable medium according to claim 7, wherein said calibrated pupil kernel is represented in said model equation utilizing a parametric representation.

9. The computer readable medium according to claim 7, wherein said calibrated pupil kernel is represented in said model equation utilizing a pixel based representation.