Micromirror device with a single address electrode

• US 20080204845A1
• Filed: 02/25/2008
• Published: 08/28/2008
• Est. Priority Date: 02/26/2007
• Status: Active Grant

• Current Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Nishino, Hirokazu, Maeda, Yoshihiro, Arai, Kazuma, Ishil, Fusao
• Granted Patent: US 7,907,320 B2
• Time in Patent Office: Days
• US Class Current: 359/224
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable, an address electrode having first and second regions arranged across the deflection axis of each mirror, a driving circuit for controlling a deflection of the mirror, and a stopper provided in a position of making contact with the mirror in a deflected state of the mirror. When the mirror makes contact with the stopper, the potential of the mirror or the stopper changes.

Claims

1. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

an elastic hinge for supporting each of said mirrors to be deflectable;

an electrode arranged on the substrate;

a driving circuit that is connected to said electrode or to said mirror via said elastic hinge, and controls a deflection of said mirror; and

a stopper provided in a position of making contact with said mirror in a deflected state of said mirror, wherein

a potential of said mirror or said stopper changes when said mirror makes contact with said stopper.

2. The micromirror device according to claim 1, wherein

said electrode is one electrode corresponding to each of said mirrors.

3. The micromirror device according to claim 1, wherein

a plurality of said electrodes are provided for each of said mirrors.

4. The micromirror device according to claim 1, wherein

said elastic hinge has a predetermined resistance value.

5. The micromirror device according to claim 1, wherein

a predetermined resistance value is comprised between said stopper and said mirror.

6. The micromirror device according to claim 1, wherein

a coulomb force between said mirror and said electrode decreases when said mirror makes contact with said stopper.

7. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

an elastic hinge for supporting each of said mirrors to be deflectable;

a potential change electrode which is arranged in a position of making contact with said mirror, and a potential of which changes along with said mirror when making contact with said mirror; and

a driving circuit that is connected to said potential change electrode, and controls said mirror.

8. The micromirror device according to claim 7, wherein

said mirror makes contact with said potential change electrode when said mirror is deflected at a maximum deflection angle.

9. The micromirror device according to claim 7, wherein

said potential change electrode also serves as a stopper for determining a deflection angle of said mirror.

10. The micromirror device according to claim 7, wherein

said mirror makes contact with said potential change electrode in a nearly horizontal state of said mirror.

11. The micromirror device according to claim 7, wherein

electric charge transfers in a portion where said mirror makes contact with said potential change electrode at the time of the contact.

12. The micromirror device according to claim 7, wherein

a coulomb force applied between said mirrors and said potential electrode while the mirror is moving toward the potential change electrode.

13. A micromirror device, comprising:

a plurality of mirrors arranged on a substrate;

an elastic hinge for supporting each of said mirrors to be deflectable;

an address electrode arranged between each of said mirrors and the substrate;

a driving circuit connected to at least said address electrode, and to said mirror via said elastic hinge; and

a potential change electrode which is arranged between each of said mirrors and the substrate, wherein

a potential of any of said potential change electrode, said mirror, and said address electrode changes when said mirror makes contact with said potential change electrode.