• US 20080212096A1
  • Filed: 03/01/2007
  • Published: 09/04/2008
  • Est. Priority Date: 03/01/2007
  • Status: Abandoned Application
First Claim
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1. A method for determining a property of a layered structure, the method comprising:

  • directing a light beam, during a process that changes a thickness of a first layer adjacent a second layer of a structure, onto the structure at a characteristic angle for the structure, the light beam including at least a first component having a first polarization and a second component having a second polarization, the characteristic angle being such that, after performance of the process, light reflected from a beam that impinges at the characteristic angle on an interface that will be formed adjacent the second layer has predominantly the first polarization;

    detecting light that the structure reflects from the light beam; and

    generating a signal upon detecting that a proportion of the reflected light that has the first polarization undergoes a change that meets a predefined criterion.

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