HEATING APPARATUS, HEAT TREATMENT APPARATUS, COMPUTER PROGRAM AND STORAGE MEDIUM
First Claim
1. A heating apparatus for heating a target object, comprising a plurality of heating light sources including LED (Light Emitting Diode) elements each for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm.
2 Assignments
0 Petitions
Accused Products
Abstract
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
59 Citations
20 Claims
- 1. A heating apparatus for heating a target object, comprising a plurality of heating light sources including LED (Light Emitting Diode) elements each for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm.
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14. A heat treatment apparatus for performing a specified heat treatment to a target object, comprising:
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an exhaustible processing chamber having an open ceiling portion; a mounting table provided within the processing chamber for supporting the object on an upper surface thereof; a light transmission window for air-tightly covering the ceiling portion of the processing chamber; a gas introducing unit for introducing a required gas into the processing chamber; and a heating apparatus provided above the light transmission window for emitting heating light toward the object, wherein the heating apparatus includes a heating light source having an LED element for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm. - View Dependent Claims (15, 16, 17, 18)
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19. A storage medium storing a computer program for controlling a heat treatment apparatus for performing a specified heat treatment to a target object, the heat treatment apparatus comprising:
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an exhaustible processing chamber having an open ceiling portion; a mounting table provided within the processing chamber for supporting the object on an upper surface thereof; a light transmission window for air-tightly covering the ceiling portion of the processing chamber; a gas introducing unit for introducing a required gas into the processing chamber; and a heating apparatus provided above the light transmission window for emitting heating light toward the object, wherein the heating apparatus comprises a heating light source including an LED element for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm, and wherein a plurality of thermoelectric conversion devices is provided in an upper portion of the mounting table, wherein the computer program controls the heat treatment apparatus to perform the specified heat treatment in such a way that, when heating the object, the heating apparatus is turned on and an electric current is allowed to flow through the thermoelectric conversion devices in such a direction as to heat the object while, when cooling the object, the heating apparatus is turned off and an electric current is allowed to flow through the thermoelectric conversion devices in such a direction as to cool the object.
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20. A storage medium storing a computer program for controlling a heat treatment apparatus for performing a specified heat treatment to a target object, the heat treatment apparatus comprising:
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an exhaustible processing chamber having an open ceiling portion; a mounting table provided within the processing chamber for supporting the object on an upper surface thereof; a light transmission window for air-tightly covering the ceiling portion of the processing chamber; a gas introducing unit for introducing a required gas into the processing chamber; and a heating apparatus provided above the light transmission window for emitting heating light toward the object, wherein the heating apparatus comprises a heating light source including an LED element for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm, and wherein a plurality of thermoelectric conversion devices is provided in an upper portion of the table, wherein the computer program controls the heat treatment apparatus to perform the specified heat treatment in such a way that, when heating the object, the thermoelectric conversion devices are first turned on to preheat the object by allowing an electric current to flow in such a direction as to heat the object and then the heating apparatus is turned on while, when cooling the object, the heating apparatus is turned off and an electric current is allowed to flow through the thermoelectric conversion devices in such a direction as to cool the object.
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Specification