DATA COLLECTION AND ANALYSIS SYSTEM
First Claim
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1. A method of determining a condition of a process in a substrate processing module, comprising:
- obtaining a first set of time-series data from measurement of a process parameter during a first occurrence of a process;
obtaining at least a second set of time-series data from measurement of the process parameter during at least a second occurrence of the process;
identifying a structure corresponding to a first portion of the first set of time-series data, the structure selected from a finite set of structures;
identifying a first portion in each of the at least a second set of time series data that correspond to the structure;
deriving a composite model from the first portion of the first set of time-series data and the first portion of each of the at least a second set of time series data;
obtaining a third set of time-series data from measurement of the process parameter during a third occurrence of the process; and
determining a degree of correlation between a portion of the third set of time-series data and the composite model.
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Abstract
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for easy configuration.
405 Citations
20 Claims
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1. A method of determining a condition of a process in a substrate processing module, comprising:
- obtaining a first set of time-series data from measurement of a process parameter during a first occurrence of a process;
obtaining at least a second set of time-series data from measurement of the process parameter during at least a second occurrence of the process;
identifying a structure corresponding to a first portion of the first set of time-series data, the structure selected from a finite set of structures;
identifying a first portion in each of the at least a second set of time series data that correspond to the structure;
deriving a composite model from the first portion of the first set of time-series data and the first portion of each of the at least a second set of time series data;
obtaining a third set of time-series data from measurement of the process parameter during a third occurrence of the process; and
determining a degree of correlation between a portion of the third set of time-series data and the composite model. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- obtaining a first set of time-series data from measurement of a process parameter during a first occurrence of a process;
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12. A data logging system for collecting and analyzing data from a processing tool, comprising:
- a plurality of sensors connected by a network, a first one of the plurality of sensors mounted to the processing tool;
a controller connected to the plurality of sensors by the network; and
a data analysis unit in communication with the controller, the data analysis unit receiving teaching time-series data from the first one of the plurality of sensors, via the controller and analyzing the teaching time-series data by correlating patterns in the teaching time series data that are similar to patterns in previously collected teaching time-series data, the patterns in the teaching time-series data and the previously collected teaching time-series data selected from a finite group of patterns. - View Dependent Claims (13, 14, 15)
- a plurality of sensors connected by a network, a first one of the plurality of sensors mounted to the processing tool;
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16. A method of assigning network addresses to a plurality of nodes in a sensor network, comprising:
- providing each of the plurality of nodes with an electrical connector for connecting to interchangeable address modules; and
connecting an address module to the electrical connector of a node, the address module providing the network address of the node and providing a visual indicator of the network address of the node. - View Dependent Claims (17, 18)
- providing each of the plurality of nodes with an electrical connector for connecting to interchangeable address modules; and
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19. A smart transducer interface module for converting an electrical signal from one form to another, comprising:
- an input that receives a first electrical signal from a sensor of a first type indicating a condition at the sensor;
an output that generates a second electrical signal that is a function of the first electrical signal, the second electrical signal being equal to the electrical signal that would be provided by a transducer of a second type experiencing the condition at the sensor. - View Dependent Claims (20)
- an input that receives a first electrical signal from a sensor of a first type indicating a condition at the sensor;
Specification