Scintillator panel and radiation image sensor

• US 20080272314A1
• Filed: 06/16/2008
• Published: 11/06/2008
• Est. Priority Date: 06/18/1998
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Sato, Hiroto, Homme, Takuya, Suzuki, Takaharu, Natsume, Yoshio, Takabayshi, Toshio
• Granted Patent: US 7,705,315 B2
• Time in Patent Office: Days
• US Class Current: 250/483.1
• CPC Class Codes: G01T 1/202 the detector being a crystal

Abstract

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Claims

1-66. -66. (canceled)

67. :

A panel for detection of radiation, comprising;

a radiation transmitting conductive substrate;

a metal film having a surface that reflects light;

an intermediate film provided between the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate;

a protective film formed of at least one inorganic film provided on the metal film; and

a converter for converting a radiation image into a visible image.

68. :

The panel according to claim 67, wherein the protective film is formed of an organic film and an inorganic film.

69. :

The panel according to claim 67, wherein the intermediate film is formed of the inorganic film.

70. :

The panel according to claim 67, wherein the intermediate film is formed of an organic film.

71. :

The panel according to claim 67, wherein the metal film includes at least two layers.

72. :

The panel according to claim 67, wherein the conductive substrate comprises an aluminum substrate.

73. :

The panel according to claim 67, wherein the inorganic film of the protective film is a light transparent film made of material containing a substance selected from the group consisting of LiF, MgF2, Si02, TiO2, Al203, MgO, and SiN.

74. :

The panel according to claim 69, wherein the protective film is formed of an organic film and an inorganic film.

75. :

The panel according to claim 67, wherein the converter comprises a scintillator including CsI.

76. :

A radiation ray imaging sensor comprising;

the panel according to claim 67; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into a visible image by the converter and the visible image is read out by the solid-image sensor.

77. :

A radiation imaging sensor, comprising;

the panel according to claim 67; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

78. :

A radiation imaging sensor, comprising;

the panel according to claim 69; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

79. :

A radiation imaging sensor, comprising;

the panel according to claim 70; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

80. :

A radiation imaging sensor, comprising;

the panel according to claim 71; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

81. :

A radiation imaging sensor, comprising;

the panel according to claim 72; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

82. :

A panel for detection of radiation, comprising;

a radiation transmitting conductive substrate formed of aluminum;

a metal film having a surface that reflects light;

an intermediate film provided between the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate and to suppress corrosion of the metal film; and

a protective film formed of at least one inorganic film provided on the metal film; and

a converter for converting a radiation image into a visible image.

83. :

The panel according to claim 82, wherein the protective film is formed of an organic film and an inorganic film.

84. :

The panel according to claim 83, wherein the inorganic film of the protective film is a light transparent film made of material containing a substance selected from the group consisting of LiF, MgF2, SiO2, TiO2, Al203, MgO, and SiN.

85. :

The panel according to claim 82, wherein the converter comprises a scintillator including CsI.

86. :

A radiation imaging sensor, comprising;

the panel according to claim 82; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

87. :

A radiation imaging sensor, comprising;

the panel according to claim 83; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

88. :

A radiation imaging sensor, comprising;

the panel according to claim 84; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.

89. :

A radiation imaging sensor, comprising;

the panel according to claim 85; and

a solid-state image sensor,

wherein a radiation image incident to the panel is converted into the visible image by the converter and the visible image is read out by the solid-image sensor.